Microelectronic fabrication system components and method for processing a wafer using such components

ABSTRACT

A process chamber is provided which includes a gate configured to align barriers with an opening of the gate and an opening of the process chamber such that the two openings are either sealed or provide an air passage to the chamber. A method is provided and includes sealing an opening of a chamber with a gate latch and exposing a topography to a first set of process steps, opening the gate latch such that an air passage is provided to the process chamber, and exposing the topography to a second set of process steps without allowing liquids within the chamber to flow through the air passage. A substrate holder comprising a clamping jaw with a lever and a support member coupled to the lever is also contemplated herein. A process chamber with a reservoir arranged above a substrate holder is also provided herein.

BACKGROUND OF THE INVENTION

[0001] 1. Field of the Invention

[0002] This invention generally relates to systems for processing amicroelectronic topography, and more specifically, to system componentsand methods for processing a wafer using such components.

[0003] 2. Description of the Related Art

[0004] The following descriptions and examples are not admitted to beprior art by virtue of their inclusion within this section.

[0005] Electroless plating is a process for depositing materials on acatalytic surface from an electrolyte solution without an externalsource of current. An advantage of an electroless deposition process isthat it can be selective, i.e., the material can be deposited only ontoareas that demonstrate appropriate chemical properties. In particular,local deposition can be performed onto metals that exhibit an affinityto the material being deposited or onto areas pretreated orpre-activated, e.g., with a catalyst. The material or catalyst appliedonto the selected areas is sometimes called a “seed material” or “seedlayer” and the ratio of the deposition rate on the activated regions tothe deposition rate at the non-activated regions is known as the“deposition process selectivity.” For many applications, it is importantto provide a deposition of high selectivity. Other importantcharacteristics of an electroless deposition process are uniformthickness and adherence of the deposited layer to the substrate.

[0006] Most conventional electroless deposition processes include aseries of solution baths. Such a series of baths are used for preparinga surface for the electroless deposition process, as well as theprocesses including and subsequent to the deposition process. Such aprocess configuration, however, facilitates the deposition of foreignparticles and/or contaminants on a substrate surface when transferringthe substrates from bath to bath. Another common problem with treating asurface in a series of baths is the exposure of the substrate surface toair during the transfer between baths. Such an exposure to air may causeoxidation of the substrate surface that will result in poor catalyticactivity and poor quality metal deposits. This problem becomesespecially troublesome when using materials that easily oxidize in air,such as copper. In an attempt to overcome these problems, some equipmentmanufacturers have proposed apparatuses which process a substrate in onechamber for a plurality of different process steps associated with anelectroless deposition process.

[0007] Such apparatuses, however, fail to prevent the solutions from theplurality of different process steps from mixing once they are expelledfrom the process chamber. Consequently, the apparatuses may not reuseprocess solutions within the apparatus, incurring higher material costsand waste disposal costs for the electroless deposition process. Inaddition, such apparatuses fail to provide a manner with which to supplyair exterior to the process chamber during processing, such as for adrying step, for example. In particular, prior art apparatuses may onlyoffer two modes of operation, one in which the chamber is sealed forprocessing and another in which the chamber is not sealed for loading.In other cases, prior art apparatuses may not be sealed at all. In anyembodiment, another problem with conventional process chambers is themanner in which a substrate is secured within the process chamber. Inparticular, few conventional process chambers offer a manner with whichto secure a substrate without causing damage to the substrate,particularly along the edges of the substrate.

[0008] One common drawback of existing electroless deposition processesand apparatuses is low speed of deposition. For example, a typicalelectroless deposition process does not generally exceed 100 nm/min. Thedeposition rate of an electroless process may generally depend on thematerial to be deposited and, therefore, the deposition rate may be muchlower than 100 nm/min, in some cases. For example, the speed ofdeposition of a cobalt-tungsten-phosphorus layer may be within betweenapproximately 0.01 nm/min and approximately 10 nm/min. In general, thedeposition rate of an electroless process may depend on characteristicsof the activated areas, such as dimensions, profiles of the exposedsurfaces, and distances between the portions of the areas to beactivated. In some embodiments, the deposition rate of an electrolessprocess may further depend on the temperature of the solution used todeposit the material. In particular, the deposition rate may increasewith increases in temperature. However, many electroless depositionsolutions tend to decompose at high temperatures, leading to significantnon-uniformities in the deposited material. On the other hand,deposition rates of electroless solutions at relatively low temperaturesmay be undesirably low, reducing production throughput and increasingfabrication costs.

[0009] Another common problem with electroless deposition processes isthe formation of gas bubbles on the substrate surface during processing.In general, the formation of gas bubbles may be due to the evolution ofhydrogen during the reduction-oxidation process of the electrolessdeposition process and/or by a high level of hydrophobicity within thesubstrate of the wafer. The gas bubbles undesirably prevent a materialfrom being deposited uniformly upon a substrate surface, potentiallydepositing a layer outside the specifications of the process.

[0010] In some embodiments, electroless deposition may be used for theformation of metal features within integrated circuits. In fact,electroless deposition techniques may be particularly advantageous forforming copper features within a microelectronic topography, which wellmatches the present trend for using copper as interconnect materialsinstead of aluminum, tungsten, suicides, or the like. In addition,electroless deposition techniques are favorable for depositing materialsinto deep holes within the topography that cannot be uniformly coveredby other deposition techniques, such as sputtering and evaporation, forexample. As such, an electroless deposition process may be advantageousfor depositing a metal material using a dual damascene process.

[0011] In some microelectronic devices, a trench comprising a metalfeature may also include a liner layer and a cap layer to prevent thediffusion of the bulk metal layer within the metal feature to underlyingand overlying layers of the topography, respectively. In some cases,however, it may be difficult to clean and activate the barrier layer fora sufficient deposition of a bulk metal layer. In particular, thebarrier layer may be cleaned and activated for the deposition of thebulk metal layer, but it may be difficult to prevent the surface frombeing contaminated between processes. In addition or alternatively, itmay be difficult to selectively deposit or align a cap layer upon thebulk metal layer such that no other metal adheres to the dielectricportions of the topography arranged adjacent to the metal feature. Inembodiments in which a bulk metal layer is polished to be confinedwithin the sidewalls of a trench, the dielectric portion of thetopography arranged adjacent to the metal feature may include smallfragments of the bulk metal layer upon its upper surface. The smallfragments may be catalytic to the electroless deposition of the caplayer or may attract a catalytic seed layer used to electrolesslydeposit the cap layer. In either case, portions of the cap layer may beundesirably deposited upon the dielectric portion, potentially causing ashort within the circuit.

[0012] As such, it would be advantageous to develop a system and methodsfor processing a microelectronic topography, particularly for processesassociated with an electroless deposition process. For example, it wouldbe desirable to develop a system which is configured to conduct one ormore process steps within a chamber without taking a microelectronictopography arranged therein out between steps. In addition, it would bebeneficial to have a system which prevents process solutions from mixingupon being dispensed from the process chamber. Such a process chambermay be further adapted to secure a wafer within the chamber as well ashave a means to provide an air passage to the chamber during processing.In some cases, the process chamber may be additionally or alternativelyadapted to prevent the generation and accumulation of bubbles upon awafer surface during processing. In addition, the process chamber may beconfigured to offer a manner with which to increase the boiling point ofan electroless deposition solution used within the chamber. Additionalbenefits may also be realized by methods which offer to provide abarrier layer which is not contaminated by particles prior to anelectroless deposition process and which is either autocatalytic or isreadily available for the deposition of a catalytic seed layer. Inaddition, it may be advantageous to develop a method which prevents thedeposition of a cap layer upon dielectric portions of a topography.

SUMMARY OF THE INVENTION

[0013] The problems outlined above may be in large part addressed byimproved systems and methods for processing a microelectronictopography. In some embodiments, the systems and method may bespecifically used for processes prior to, during, and subsequent to anelectroless deposition process. However, the system and methodsdescribed herein are not necessarily restricted to such processes. Ingeneral, a system is provided which is adapted to conduct one or moreprocesses within a process chamber. In some embodiments, the system maybe adapted to conduct a succession of processes without having themicroelectronic topography removed from the process chamber.Alternatively, however, the system may be used to conduct a singleprocess. In either case, the system described herein may include aprocess chamber having a plurality of auxiliary equipment arrangedtherein and coupled thereto. For example, the system may include aplurality of supply lines, storage tanks, process control devices, andtemperature and pressure gauges. In addition, the process chamber mayinclude a substrate holder, a plurality of inlets and outlets, a loadingport, and a plurality of other components, such as a gate, for example.It is noted that the plurality of components and methods provided hereinare not co-dependent and, therefore, may not necessarily be employedtogether. In particular, the system described herein may be constructedto include any combination of the components described below. Inaddition, the methods for processing a microelectronic topography, asdescribed herein, may include any one or a plurality of the methodsdiscussed below.

[0014] In general, the system described herein may be adapted to form afirst enclosed area about and including a substrate holder of a processchamber of the system. In some embodiments, however, the system may beadapted to form another, smaller enclosed area about and including thesubstrate holder. Such an adaptation to form two different enclosedregions may entail the process chamber to include at least two outerportions configured to couple with each other and form the firstenclosed region and at least two inner portions configured to couplewith each other and form the second enclosed region. As noted above, insome embodiments, the system may be adapted to perform a succession ofdifferent process steps within the process chamber. In such anembodiment, the system may be further adapted to couple the outerportions prior to the succession of the different process steps. In somecases, however, the system may be adapted to uncouple the outer portionsfor a drying process of the microelectronic topography. Alternatively,the outer portions may not be uncoupled for such a drying process.

[0015] In either case, the system may be adapted to couple and uncouplethe inner portions between the different process steps withoutuncoupling the outer portions. For example, in some cases, the systemmay be adapted to couple the inner portions prior to an electrolessdeposition process and uncouple the inner portions subsequent to theelectroless deposition process. Consequently, the system may be adaptedto dispense different processing fluids into the first and secondenclosed areas during the different process steps. “Fluids,” as usedherein, may refer to liquids, gases, or plasmas, including gases in astandard state or an excited state (i.e., a photon-activated gas state).The fluids in any of such states of matter may be used at pressuresbelow, at, or above atmospheric pressure as well as at temperaturesassociated with the respective process step of the fabrication process.In some embodiments, the process chamber may include a first outletwithin one of the outer portions and a second outlet within one of theinner portions. In some cases, the process chamber may be adapted toprevent processing fluids in the first enclosed area from entering thesecond outlet. For example, the process chamber may include a means forspinning the microelectronic topography. In particular, the processchamber may be adapted to spin the microelectronic topography at aparticular rate, such as between approximately 0 rpm and approximately8000 rpm, or more specifically between approximately 40 rpm andapproximately 1200 rpm when the inner portions are uncoupled. Incontrast, the microelectronic topography may or may not be spun when theinner portions are coupled.

[0016] A method for processing a microelectronic topography using achamber adapted to form different enclosed regions about a substrateholder is contemplated herein. In particular, the method may includeloading the microelectronic topography into a process chamber andclosing the process chamber to form a first enclosed area about themicroelectronic topography. The formation of the first enclosed areamay, in some embodiments, include moving a cover plate toward a baseplate of the process chamber. In yet other embodiments, however, theformation of the first enclosed area may include moving the base platetoward the cover plate or moving the cover plate and base plate towardeach other. In either case, the method may further include supplying afirst set of fluids to the first enclosed area to process themicroelectronic topography in one or more process steps. Subsequently,the method may include forming a second, distinct enclosed area aboutthe microelectronic topography and supplying a second set of fluids tothe second enclosed area to further process the microelectronictopography in one or more other process steps.

[0017] In some cases, the first set of fluids may include fluids forpreparing the microelectronic topography for an electroless depositionprocess, while the second set of fluids may include a depositionsolution for the electroless deposition process. In such an embodiment,the method may further include reforming the first enclosed areasubsequent to the step of supplying the second set of fluids andsupplying a third set of fluids to the reformed first enclosed area tofurther process the microelectronic topography.

[0018] Alternatively, the first set of fluids may include a depositionsolution for an electroless deposition process, and the second set offluids may include fluids for processing the microelectronic topographysubsequent to the electroless deposition process.

[0019] In any case, the method may further include spinning themicroelectronic topography. Such a spinning step may be conducted whilethe first and/or second set of fluids is supplied to the processchamber. In some embodiments, spinning the microelectronic topographymay be further conducted during the formation of the first and/or secondenclosed areas. In general, the rate at which to spin the topography maydepend on the material supplied to the process chamber. In particular, arelatively high spin rate may be needed for fluids with a relativelyhigh viscosity, while a relatively lower spin rate may be needed forfluids with a relatively low viscosity. As such, the spin rate of thetopography when the first and second sets of fluids are supplied to theprocess chamber may be similar or may be substantially different. In anycase, the microelectronic topography may generally be spun at a ratebetween approximately 0 rpm and approximately 8000 rpm, or morespecifically between approximately 40 rpm and approximately 1200 rpm,depending on the viscosity of the fluid supplied to the process chamber.In some embodiments, the topography may be rotated at a sufficient rateto prevent fluids from entering a certain outlet as stated above.

[0020] As noted above, the process chamber may have a gate attachedthereto in some embodiments. As such, a process chamber is providedwhich includes a wall with an opening and a gate casing arrangedadjacent to the wall such that an opening within the gate casing openingis spaced laterally adjacent to the wall opening. In some cases, thegate casing may be arranged such that the gate casing opening is spacedin direct lateral alignment with the wall opening. In such anembodiment, the wall opening and the gate casing opening may includedimensions large enough to allow one or more wafers to be loaded withinthe process chamber. In yet other embodiments, the openings may notnecessarily need to have dimensions that large, particularly when thegate is simply used to provide an air passage to the process chamber asdescribed below. As such, the gate casing may not necessarily bearranged such that the gate casing opening is in direct lateralalignment with the wall opening.

[0021] In either case, the process chamber may further include a gatelatch configured to align barriers of the gate latch with the wallopening and the gate casing opening. In some embodiments, the gate latchis configured to move within the space between the wall and gate casing.In this manner, the gate latch may be configured to move the barrierssuch that the barriers are not in alignment with the wall opening andgate casing opening as well. In some cases, the portion of the gatelatch comprising the barriers may be configured to move such that thetwo openings are either sealed or provide an air passage to the processchamber when the barriers are respectively aligned with the twoopenings. In this manner, the barriers may prevent fluids within theprocess chamber from flowing through the wall opening and gate casingopening whenever the barriers are respectively aligned with the twoopenings. In some embodiments, the process chamber may be adapted todraw air through the air passage and into the process chamber.

[0022] Consequently, a method for processing a microelectronictopography within a process chamber having such a gate is providedherein. The method may include loading a microelectronic topography intoa process chamber. Such a step of loading may include introducing themicroelectronic topography through an opening of the process chamberthat serves as a loading port of the chamber, which may or may not havethe gate arranged adjacent thereto. The method may further includesealing the loading port or another opening within the process chamberwith a gate. In some cases, the step of sealing may include moving thegate such that barriers of the gate are in alignment with the opening ofthe process chamber. Alternatively, the gate may be fixed adjacent tothe opening. In either case, the method may further include exposing themicroelectronic topography to a first set of process steps. In someembodiments, the first set of process steps may include electrolesslydepositing a layer upon the microelectronic topography as well asprocess steps conducted prior to or subsequent to an electrolessdeposition process. However, the method is not restricted to suchprocess steps.

[0023] The method may continue on with opening the gate such that an airpassage is provided to the process chamber. The microelectronictopography may then be exposed to a second set of process steps withoutallowing liquids within the process chamber to flow through the airpassage. In some embodiments, the second set of process steps mayinclude drying the microelectronic topography. In addition oralternatively, the second set of process steps may include any otherprocess steps with which to process a microelectronic topography. In anycase, the method may further include removing the microelectronictopography from the process chamber subsequent to exposing thetopography to the first and second set of process steps. In cases inwhich the gate is arranged adjacent to a loading port of the processchamber, the step of removing may include moving the gate such thatbarriers of the gate do not block the opening of the process chamber.

[0024] As noted above, the process chamber may include a substrateholder with which to support a wafer for processing. In someembodiments, the substrate holder may be configured to prevent asubstantial amount of movement of the wafer during processing. Inparticular, the substrate holder may, in some embodiments, include aclamping jaw adapted to prevent substantial movement of a wafer arrangedupon the substrate holder. Such a clamping jaw may include a leverarranged along an edge of the substrate holder and a support memberpivotally coupled to the lever. In some cases, the clamping jaw may beone of a plurality of clamping jaws spaced within the substrate holder.In general, the lever may include a first portion and a second portion.In some cases, the first portion may be longer than the second portion.In addition or alternatively, the first portion may be heavier than thesecond portion. In any case, the second portion may include a lipextending into a wafer receiving area of the substrate holder. Ingeneral, the clamping jaw may be configured to lower the lip upon thewafer or to a level spaced above the wafer.

[0025] Since the elemental composition of a process fluid may directlyaffect the reaction rate and uniformity of treating a microelectronictopography, process fluids may need to be analyzed and adjusted prior tobeing supplied to process chamber 22. As such, the system describedherein may include analytical test equipment for monitoring fluids usedwithin a process chamber. In general, the analytical test equipment maybe used to measure the concentration of elements within the processfluid. In this manner, it can be determined whether the process fluid isin specification or if the process fluid needs to be adjusted. Suchanalytical test equipment may be coupled to any supply line of thesystem, including those coupled to inlet and outlets of the processchamber. In addition or alternatively, the analytical test equipment maybe coupled to directly to the process chamber or to one or more storagetanks configured to hold process fluids used within the process chamber.

[0026] In some embodiments, it may be particularly advantageous to beable to analyze four or more components within a system. For example,embodiments in which the system is used for a plurality of processes,such as the processes conducted prior to, during, and/or subsequent toan electroless deposition process, the adaptation of being able tomeasure the concentration of at least four elements may be advantageoussince the fluids used for the different process steps may have differentcompositions. In yet other embodiments, it may be advantageous to employanalytical test equipment with such an adaptation for processes whichuse solutions with a plurality of elements. An exemplary process using asolution with at least four elements is described in more detail belowin which a four-element barrier layer is deposited. In such anembodiment, it may be particularly advantageous for the analytical testequipment to be configured to measure the concentration of at least fourelements selected from the group consisting of boron, chromium, cobalt,molybdenum, nickel, phosphorus, rhenium, and tungsten. In any case, thesystem may further include a central processing unit (CPU) coupled tothe analytical test equipment. Such a CPU may include a carrier mediumcomprising program instructions executable on a computer system foradjusting compositions of the fluids based upon the analysis performedby the analytical test equipment.

[0027] In general, the system described herein may be adapted to provideany process fluid for processing a microelectronic topography to aprocess chamber, including liquids, gases, and/or plasmas. In someembodiments, it may be particularly advantageous to perform a processusing a single phase. For example, employing a single liquid phaseenvironment may offer a manner with which to control the pressure withinthe process chamber. In general, increasing the pressure of a solutionmay advantageously increase the boiling point of the solution. Inembodiments of electroless deposition, an increase in the boiling pointof the deposition solution may increase the temperature at which thesolution decomposes and may further allow the rate of deposition to beincreased. As such, a method for electrolessly depositing a layer upon amicroelectronic topography exclusively using a liquid phase iscontemplated herein. In general, the method may include loading thewafer into an electroless deposition chamber, sealing the electrolessdeposition chamber to form an enclosed area about the microelectronictopography, and filling the enclosed area with a deposition solution. Insome cases, filling the chamber may include pressurizing the enclosedarea to a pressure between approximately 5 psi and approximately 100psi, increasing the boiling point of the deposition solution. In someembodiments, the method heating the deposition solution to a temperatureless than approximately 25% below the boiling point of the depositionsolution to increase a reaction rate of the deposition solution with themicroelectronic topography.

[0028] In some cases, a process chamber may include a particularconfiguration to process a microelectronic topography using asingle-phase solution. For example, a process chamber is contemplatedherein which includes a substrate holder and a reservoir arranged abovethe substrate holder and within sidewalls of the process chamber. Amethod for using such a process chamber is also provided herein. Ingeneral, the process chamber may be adapted to move the reservoirproximate to the substrate holder and dispense the fluids containedwithin the reservoir into an enclosed area laterally bound by themicroelectronic topography and the reservoir. In some cases, thereservoir may include one or more valves and the process chamber may beadapted to open the valves upon moving the reservoir proximate to thesubstrate holder. Such valves may be generally adapted to allowbi-directional flow of the fluids between the reservoir and themicroelectronic topography. In some cases, the reservoir mayadditionally or alternatively include a hatch. In such an embodiment,the process chamber may be adapted to move the hatch within thereservoir upon moving the reservoir proximate to the substrate. In somecases, the process chamber may be further adapted to rotate the hatchwhen the hatch is moved within the reservoir. In such an embodiment, itmay be particularly advantageous to rotate the hatch at rate sufficientto prevent the accumulation of bubbles upon the microelectronictopography during processing. In any case, the method of processing thetopography may terminate upon closing the hatch and raising thereservoir to a level spaced above the substrate holder.

[0029] Regardless of the configuration of the process chamber, a methodfor processing a microelectronic topography within a process chamber mayinclude replenishing the fluids provided to the chamber for processing.Such a step of replenishing may, in some embodiments, include wideningone or more outlet passages of the process chamber such that a compositesecond dispensing flow rate of the deposition solution through theoutlets is substantially equal to the first inlet flow rate of thedeposition solution. Alternatively, the step of replenishing may includedecreasing the first inlet flow rate of the deposition solution to asecond inlet flow rate that is substantially equal to the firstdispensing flow rate of the deposition solution through outlets of theprocess chamber. In yet other embodiments, the step of replenishing mayinclude decreasing the first inlet flow rate of the deposition solutionto the process chamber to a second inlet flow rate and widening one ormore of the outlet passages to a composite second dispensing flow rate,wherein the composite second dispensing flow rate is substantially equalto the second inlet flow rate.

[0030] In some cases, pressurizing the chamber may be advantageous forminimizing the generation and accumulation of bubbles upon a surface ofa wafer during an electroless deposition process. In addition oralternatively, positioning a wafer face-up within a processing chambermay reduce generation and accumulation of bubbles upon a wafer. In yetother embodiments, agitating a solution used for an electrolessdeposition process may further or alternatively minimize the generationand accumulation of bubbles upon a wafer surface. As such, a method mayminimizing the accumulation of bubbles upon a wafer during anelectroless deposition process is provided herein. In general, themethod may include loading the wafer into an electroless depositionchamber, sealing the electroless deposition chamber to form an enclosedarea about the wafer, and supplying a deposition solution to theenclosed area. In addition, the method may include agitating thedeposition solution to create an amount of motion sufficient to form alayer having substantially uniform thickness. In some cases, the methodmay further include pressurizing the enclosed area to a predeterminedvalue, such as between approximately 5 psi and approximately 100 psi. Inthis manner, the steps of agitating and pressurizing may collectivelyreduce the amount of bubbles formed upon the wafer during theelectroless deposition process. In addition or alternatively, the stepof loading the wafer may include positioning the wafer face-up withinthe electroless deposition chamber such that the generation of bubblesmay be further reduced.

[0031] In any case, agitating the deposition solution may be conductedin several different manners. For example, in some embodiments,agitating the solution may include spraying the deposition solution intothe process chamber at a rate between approximately 0.1 gallons perminute and approximately 10 gallons per minute. In addition oralternatively, the supply of the deposition solution may be pulsed intothe process chamber at a frequency between approximately 0.1 Hz andabout 10 KHz, for example. In yet other embodiments, the process chambermay include a means for agitating a solution which is distinct frominlets and supply lines used to the supply of deposition solution to theprocess chamber. For example, the process chamber may include atransducer configured to supply acoustic waves, such as ultrasonic ormegasonic waves, to the deposition solution. In such an embodiment, thestep of agitating may include propagating the acoustic waves parallel orperpendicular to a treating surface of the wafer. In yet otherembodiments, the step of agitating may include propagating the acousticwaves at an angle between approximately 0° and approximately 90°relative to a treating surface of the wafer.

[0032] In addition or alternatively, the process chamber may include adevice configured to move through the deposition solution and above thewafer during processing. In some embodiments, the device may beconfigured to come into contact with the wafer. In other embodiments,however, the device may be configured to not come into contact with thewafer. In general, the device may include any mechanism which may causea sufficient amount of agitation with which to remove and/or prevent theaccumulation of bubbles on the surface of the underlying wafer. Forexample, in some embodiments, the device may include a brush with aplurality of bristles to stir the fluid within the process chamber. Inyet other embodiments, the device may include a rod, block, propeller,or plate. Consequently, it is noted that the device may include anydesign and may traverse at any speed sufficient to cause a disturbancewith which to minimize the number of bubbles of a wafer surface. In anycase, the device may, in some embodiments, be adapted to dispense fluidsto the wafer surface.

[0033] In addition to providing methods for processing a microelectronictopography which correlate to the system described herein, methods forforming a contact structure or a via within a dielectric layer are alsoprovided. It is noted that the methods described below may be conductedusing the system described herein, but are not restricted to the use ofsuch a system. Furthermore, the different process steps used to form acontact structure are not necessarily co-dependent and, therefore, maybe performed independent of each other.

[0034] In some embodiments, the method for forming a contact structureor via within a dielectric layer may include forming a liner layer upona microelectronic topography and converting at least a portion of theliner layer to a hydrated oxide layer. In some cases, the step ofconverting may include exposing the liner layer to an oxidizing plasma.In yet other embodiments, the step of converting may include exposingthe liner layer to an oxidizing fluid. In either case, the liner layermay include a metal layer in some embodiments. For example, the linerlayer may include a metal selected from a group consisting of tantalum,tantalum nitride, tantalum silicon nitride, tantalum carbon nitride,titanium, titanium nitride, titanium silicon nitride, tungsten andtungsten nitride. In some embodiments, the liner layer may include acombination of such materials, such as a stack of tantalum nitride andtantalum or a stack of titanium and titanium nitride, for example. Ineither case, the step of converting a portion of the liner layer mayinclude forming a metal oxide layer. For example, in embodiments inwhich the liner layer includes tantalum and the hydrated metal oxidelayer may include tantalic acid. In yet other embodiments, the linerlayer may include a dielectric material, such as silicon nitride,silicon carbide, silicon carbon nitride, silicon oxycarbide, siliconoxycarbon nitride, and/or any organic materials generally known for usein microelectronic fabrication. In such an embodiment, a portion of theliner layer may be converted into a hydrated and oxidized dielectriclayer.

[0035] In any case, the method may further include depositing a metallayer upon the hydrated oxide layer. Consequently a microelectronictopography may be formed which includes a hydrated oxide layer and ametal layer formed upon and in contact with the hydrated oxide layer.More specifically, in embodiments in which the liner layer includes ametal, a microelectronic topography may be formed which includes ahydrated metal oxide layer and a metal layer formed upon and in contactwith the hydrated metal oxide layer. In some embodiments, the metallayer may be electroless deposited upon the hydrated oxide layer. Inother embodiments, however, the metal layer may be deposited usingprocesses other than electroless techniques. In some embodiments, themethod may include converting the hydrated oxide layer to an oxide layersubsequent to the deposition of the metal layer. Such a conversion thehydrated oxide layer to the oxide layer may include heating themicroelectronic topography to a temperature greater than approximately400° C. In yet other embodiments, the method may include converting thehydrated oxide layer a different material subsequent to the step ofdeposition the metal layer. For example, in an embodiment in which thehydrated oxide layer includes a metal, the method may include convertinga hydrated metal oxide layer into a metal layer. Such a conversion ofthe hydrated metal oxide layer to the different material may includeannealing the microelectronic topography in an ambient comprisinghydrogen.

[0036] In yet other embodiments, the method for forming a contactstructure or via within a dielectric layer may additionally oralternatively include selectively depositing a second dielectric layerupon a first dielectric layer and selectively depositing a metal layerupon portions of the topography arranged adjacent to the firstdielectric layer such that the deposition of the metal layer upon thefirst dielectric is minimized. In some embodiments, the step ofselectively depositing the second dielectric layer may includedepositing a hydrophobic material. Such a hydrophobic material may bedeposited by exposing the microelectronic topography todichlorodimethylsilane or any xylene material configured to form ahydrophobic material. More specifically, the hydrophobic material may bedeposited using organic vapor deposition.

[0037] In some embodiments, the method may further include removing thesecond dielectric layer subsequent to the step of selectively depositingthe metal layer. In yet other cases, the second dielectric layer mayremain within the microelectronic topography for further processing. Ineither case, a microelectronic topography may be formed which includes ametal feature having a second metal layer formed upon and in contactwith a first metal layer. In addition, the microelectronic topographymay include a dielectric portion having a lower layer of hydrophilicmaterial and upper layer of hydrophobic material. In some embodiments,the dielectric portion may have a lower surface substantially coplanarwith a lower surface of the metal feature. In addition or alternatively,the upper surfaces of the lower layer and the second metal layer may besubstantially coplanar. In any case, the thickness of the upper portionmay be less than approximately 500 angstroms.

[0038] Another microelectronic topography which may be formed using themethods described herein may include a metal feature having a singlelayer comprises at least four elements lining a lower surface andsidewalls of the metal feature. In some embodiments, the single barrierlayer may include at least four elements selected from a groupconsisting of boron, chromium, cobalt, molybdenum, nickel, phosphorus,rhenium, and tungsten. In addition, the concentration of elements withinthe single barrier layer may include three elements each comprisingbetween approximately 0.1% and approximately 20% of a molarconcentration of the barrier layer and a fourth element comprising thebalance of the molar concentration. In some embodiments, the fourthelement may include cobalt or nickel. In some embodiments, the singlebarrier layer may be configured to substantially prevent oxidation. Inaddition or alternatively, the single barrier layer may be configured tosubstantially prevent diffusion of a bulk metal layer formed upon thesingle barrier layer to other layers within the microelectronictopography. In some embodiments, the metal feature may further include asecond single barrier layer comprising at least four elements arrangedupon and in contact with the bulk metal layer.

[0039] There may be several advantages to using the system and methodsdescribed herein. For example, a system is provided which is adapted toconduct one or more process steps within a chamber without removing thewafer arranged within the chamber. In this manner, the deposition offoreign particles and oxidation of the topography may be minimized. Inaddition, a process chamber is provided which prevents process solutionsfrom mixing upon being dispensed from the process chamber. Consequently,one or more of the process fluids used in the process chamber may berecycled, reducing material and waste disposal costs associated with theprocess. Moreover, a substrate holder is provided which is adapted tosecure a wafer within a chamber such that a wafer is not damaged duringprocessing. In addition, a gate adapted to provide an air passage to theprocess chamber during processing is provided. In this manner, ambientair exterior to the process chamber may be supplied to the processchamber for a drying process, for example. Furthermore, a method and asystem for reducing the generation and accumulation of bubbles upon awafer surface during processing is provided. As a result, asubstantially uniform layer may be deposited. In some cases, the methodand system described herein may increase the boiling point of anelectroless deposition solution used within a process chamber. Such anincrease in the boiling point may, in some embodiments, may be used toincrease the deposition rate of the layer, increasing productionthroughput of the system.

[0040] Additional benefits may also be realized by the method ofhydrating the barrier layer prior to an electroless deposition process.In particular, such a process may advantageously allow the barrier layerto be readily available for the deposition of a catalytic seed layerwhile preventing the accumulation of particulate matter upon the barrierlayer. Consequently, a more uniform bulk metal layer may be depositedthereon. In embodiments in which the barrier is formed to include atleast four elements, the barrier layer may be autocatalytic and,therefore, may not need the extraneous process steps of activating thebarrier layer. Furthermore, the method which deposits a hydrophobiclayer upon dielectric portion of the topography prior to the depositionof a cap layer may advantageously prevent the deposition of a the layerupon dielectric portions of a topography, potentially preventing theformation of a short within the device.

BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Other objects and advantages of the invention will becomeapparent upon reading the following detailed description and uponreference to the accompanying drawings in which:

[0042]FIG. 1 depicts a schematic diagram of a system for processing amicroelectronic topography;

[0043]FIG. 2a depicts a partial cross-sectional view of a gate attachedto a process chamber in an open position;

[0044]FIG. 2b depicts a partial cross-sectional view of the gate fromFIG. 2a in an unsealed closed position;

[0045]FIG. 2c depicts a partial cross-sectional view of the gate fromFIG. 2a in sealed position;

[0046]FIG. 3 depicts a flow chart for processing a microelectronictopography using a process chamber with a gate attached thereto;

[0047]FIG. 4 depicts a partial cross-sectional view of a substrateholder;

[0048]FIG. 5 depicts a flow chart for processing a microelectronictopography exclusively employing a liquid phase environment;

[0049]FIG. 6a depicts a partial cross-sectional view of a processchamber with a reservoir arranged above a substrate holder;

[0050]FIG. 6b depicts a partial cross-sectional view of the processchamber of FIG. 6a subsequent to lowering the reservoir toward thesubstrate holder;

[0051]FIG. 6c depicts a partial cross-sectional view of the processchamber in which a hatch of the reservoir has been raised subsequent tothe lowering of the reservoir in FIG. 6b;

[0052]FIG. 6d depicts a partial cross-sectional view of the processchamber in which the hatch of the reservoir has been lowered back downto the base of the reservoir subsequent to the raising of the hatch inFIG. 6c;

[0053]FIG. 7 depicts a flow chart for minimizing the generation ofbubbles upon a wafer surface during processing;

[0054]FIG. 8a depicts a top view of a process chamber included withinthe system depicted in FIG. 1 having a plurality of inlets spatiallyarranged about a substrate holder;

[0055]FIG. 8b depicts a top view of the plurality of spatially arrangedinlets of FIG. 8a configured to project fluid in a different direction;

[0056]FIG. 9a depicts a partial cross-sectional view of a processchamber in an open position;

[0057]FIG. 9b depicts a partial cross-sectional view of the processchamber of FIG. 9a in which outer portions are coupled to form a firstenclosed region;

[0058]FIG. 9c depicts a partial cross-sectional view of the processchamber of FIG. 9a in which inner portions are coupled to form a secondenclosed region;

[0059]FIG. 10 depicts a flow chart for processing a microelectronictopography using the process chamber of FIGS. 9a-9 c;

[0060]FIG. 11 depicts a partial cross-sectional view of amicroelectronic topography having a trench formed within a dielectriclayer;

[0061]FIG. 12 depicts a partial cross-sectional view of themicroelectronic topography of FIG. 11 subsequent to the formation of aliner layer upon the upper surface of the topography;

[0062]FIG. 13 depicts a partial cross-sectional view of themicroelectronic topography of in which an upper portion of the linerlayer is hydrated subsequent to the formation of the liner layer;

[0063]FIG. 14 depicts a partial cross-sectional view of themicroelectronic topography in which a bulk metal layer is formed uponthe hydrated surface of the liner layer subsequent to the formation ofthe hydrated surface in FIG. 13;

[0064]FIG. 15 depicts a partial cross-sectional view of themicroelectronic topography in which the bulk metal layer is planarizedsubsequent to the formation of the bulk metal layer in FIG. 14;

[0065]FIG. 16 depicts a partial cross-sectional view of themicroelectronic topography in which a hydrophobic dielectric layer isformed upon the dielectric layer subsequent to the planarization of thebulk metal layer in FIG. 15;

[0066]FIG. 17 depicts a partial cross-sectional view of themicroelectronic topography in which a cap layer is formed upon the bulkmetal layer subsequent to the formation of the hydrophobic dielectriclayer in FIG. 16; and

[0067]FIG. 18 depicts a partial cross-sectional view of themicroelectronic topography in which the hydrophobic layer is removedsubsequent to the formation of the cap layer in FIG. 17.

[0068] While the invention is susceptible to various modifications andalternative forms, specific embodiments thereof are shown by way ofexample in the drawings and will herein be described in detail. Itshould be understood, however, that the drawings and detaileddescription thereto are not intended to limit the invention to theparticular form disclosed, but on the contrary, the intention is tocover all modifications, equivalents and alternatives falling within thespirit and scope of the present invention as defined by the appendedclaims.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0069] Turning now to the drawings, exemplary embodiments of systems andmethods for processing a microelectronic topography are illustrated inFIGS. 1-18. More specifically, FIG. 1 illustrates an exemplaryembodiment of a system that may be used for processing a microelectronictopography, while FIGS. 2a-10 show detailed illustrations of particularcomponents of the system in FIG. 1 as well as methods of using such asystem. Furthermore, FIGS. 11-18 illustrate a method for processing amicroelectronic topography which may be conducted using the system shownin FIG. 1 or any other system adapted for such a method. It is notedthat the plurality of component designs and methods illustrated in FIGS.1-18 are not co-dependent and, therefore, may not necessarily beemployed together. In particular, the system described herein may beconstructed to include any combination of the components described inreference to FIGS. 1, 2a-2 c, 4, 6 a-6 d, 8 a, 8 b, and 9 a-9 c. Inaddition, the methods for processing a microelectronic topography, asdescribed herein, may include any one or a plurality of the methodsdiscussed in reference to FIGS. 3, 5, 7, and 10-18.

[0070] The system illustrated in FIG. 1 is designated, as a whole, byreference numeral 20. In general, system 20 may include process chamber22 with which to process a microelectronic topography. Morespecifically, process chamber 22 may be used for one or more processessteps used to fabricate a microelectronic device, such as depositing,etching, activating, polishing, cleaning, rinsing, drying, or anycombination of such processes. In a preferred embodiment, processchamber 22 may be used for any of the processes associated with anelectroless deposition process, including any processes performed priorto, during, or subsequent to an electroless deposition process. Forexample, in some cases, process chamber 22 may be used to activate asurface of a microelectronic topography such that a layer may besubsequently deposited using an electroless process within processchamber 22 or within a different process chamber. In addition oralternatively, process chamber 22 may be used for polishing and/orcleaning an electrolessly deposited layer as well as depositing a caplayer upon the electroless deposited layer. In yet other embodiments,process chamber 22 may be used for processes not associated with anelectroless deposition process.

[0071] As shown in FIG. 1, process chamber 22 may have a plurality ofauxiliary components arranged therein and coupled thereto. Inparticular, process chamber 22 may include chamber walls, a cover, asubstrate holder, a means for dispensing fluids within the chamber, aswell as a plurality of other components as described in more detailbelow. In addition, process chamber 22 may be coupled to a plurality ofsupply lines, storage tanks, and process control devices, such as butnot limited to temperature and pressure gauges. In general, thecomponents of process chamber 22 may be made of or may have a surfacecoated with a chemically stable material that can withstand the actionof aggressive solutions used within process chamber 22. Such a materialmay further be stable with temperatures ranging between approximately−20° C. and approximately 800° C. and pressures ranging betweenapproximately 1 psi and approximately 150 psi. Examples of suchmaterials are Teflon, ceramics of certain types, or the like.

[0072] In addition, process chamber 22 may be configured to behermetically sealed such that, in a closed state, the interior ofprocess chamber 22 may be isolated from an ambient exterior to processchamber 22. In this manner, the pressure within process chamber 22 maybe regulated. More specifically, process chamber 22 may be pressurizedto a level greater than, equal to, or less than the pressure of theambient exterior to process chamber 22. In some cases, the lower edge ofthe cover 24 may be beveled to prevent accumulation of solution on thecover. As a result, cross contamination of fluids between processes maybe prevented. In addition, process chamber 22 may be mounted at anyangle relative to the position illustrated in FIG. 1. In particular,process chamber 22 may be mounted with cover 24 above base 25 as shownin FIG. 1, with cover 24 and base 25 side by side, or with base 25 abovecover 24.

[0073] In general, process chamber 22 may be adapted to provide anopening with which to load one or more wafers upon substrate holder 48.In particular, process chamber 22 may include loading port 26 alongchamber wall 23 as shown in FIG. 1. In general, one or more wafers maybe loaded through loading port 26 via a mechanical arm installed outsideprocess chamber 22. In some embodiments, process chamber 22 may includegate 28 arranged adjacent to loading port 26 to control access to theinterior of process chamber 22. An exemplary configuration of gate 28 isillustrated in FIGS. 2a-2 c and is described in more detail below. Asnoted in reference to FIGS. 2a-2 c, however, gate 28 may not be used toallow a wafer to be loaded therethrough, in some embodiments. Rather,gate 28 may simply be adapted to provide an air passage to processchamber 22. As such, in some embodiments, gate 28 may not be arrangedadjacent to loading port 26. In yet other embodiments, process chamber22 may not include gate 28 at all. As such, in some cases, processchamber 22 may include an alternative means for providing access to theinterior of process chamber 22 such that a wafer may be positioned uponsubstrate holder 48. For instance, in some cases, loading port 26 may bepositioned along another portion of chamber wall 23. In yet otherembodiments, cover 24 may be configured to allow a wafer to be loadedonto substrate holder 48.

[0074] Turning to FIGS. 2a-2 c, an exemplary illustration of gate 28 isshown. As shown in FIGS. 2a-2 c, gate 28 may be coupled to chamber wall23. As noted above, however, gate 28 may alternatively be arrangedadjacent to cover 24. In general, gate 28 may provide access and/or anair passage to process chamber 22 as well as a manner with which to sealthe process chamber. In particular, FIG. 2a illustrates gate 28 in aposition to provide access to process chamber 22 such that one or morewafers may be loaded therein. FIG. 2b, on the other hand, illustratesgate 28 in a position to provide an air passage to process chamber 22while prohibiting fluid within the process chamber from escaping throughgate 28. The position of gate 28 to seal process chamber 22 isillustrated in FIG. 2c.

[0075] In general, gate 28 may include gate latch 30 and gate casing 32.As shown in FIGS. 2a-2 c, gate latch 30 may be interposed betweenchamber wall 23 and gate casing 32. Gate casing 32 may have opening 34and may be arranged such that opening 34 is spaced laterally adjacent toopening 26 within chamber wall 23. In some embodiments, gate casing 32may be arranged such that openings 34 and 26 are in direct lateralalignment with each other as shown in FIGS. 2a-2 c. In such anembodiment, openings 34 and 26 may include dimensions large enough toallow one or more wafers to be loaded within the process chamber. In yetother embodiments, openings 34 and 26 may not necessarily need to havedimensions that large. In particular, openings 34 and 26 may notnecessarily need to have dimensions large enough to allow one or morewafers to be loaded within the process chamber when gate 28 is simplyused to provide an air passage to process chamber 22 as described inmore detail below. In such an embodiment, openings 34 and 26 may notnecessarily be in direct lateral alignment with each other.

[0076] In general, gate latch 30 may be configured to align barriers 36and 38 with the openings 34 and 26, respectively. Such a configurationmay include sliding gate latch 30 between chamber wall 23 and gatecasing 32. Although FIGS. 2a and 2 b indicate that such a slidingmovement is started with gate latch 30 positioned below openings 34 and26, gate latch 30 may alternatively be positioned above the openingsprior to such a movement. In yet other embodiments, gate latch 30 mayhave barriers 36 and 38 permanently located in lateral alignment withopenings 34 and 26. In such an embodiment, gate latch 30 may not be usedto load a wafer into process chamber 22. Rather, gate latch 30 maysimply be used to provide an air passage to process chamber 22 and/orseal process chamber 22. In any case, when barriers 36 and 38 arerespectively aligned with openings 34 and 26, the portion of gate latch30 comprising barriers 36 and 38 may be configured to provide an airpassage to process chamber 22 as shown by dotted line 40 in FIG. 2b ormay be configured to move such that the two openings are sealed as shownin FIG. 2c. As noted above, the position illustrated in FIG. 2b mayprovide an air passage to process chamber 22 while prohibiting fluidwithin the process chamber from escaping through gate latch 30. In thismanner, gate latch 30 may offer a manner with which to provide air toprocess chamber 22 while processing a wafer therein. Processes employingsuch an air passage may include, for example, a drying process. In someembodiments, process chamber 22 may employ a vacuum with which to drawair from the air passage.

[0077] In any case, a method for processing a microelectronic topographywithin a process chamber having a gate similar to gate 28 is depicted inFIG. 3. In particular, FIG. 3 illustrates a method which includesloading a microelectronic topography into a process chamber as shown instep 42. Such a step of loading may include introducing themicroelectronic topography through an opening of the process chamberthat serves as a loading port of the chamber. The method may furtherinclude sealing an opening of the process chamber with a gate as shownin step 43. In some cases, the gate may be used to seal the loading portof the chamber. As such, in some embodiments, the step of sealing mayinclude moving the gate such that barriers of the gate are in alignmentwith the opening of the process chamber. In other embodiments, however,the gate may be used to seal an opening of the chamber which is distinctfrom the loading port of the chamber. In either case, the method mayfurther include step 44 in which the microelectronic topography isexposed to a first set of process steps. In some embodiments, the firstset of process steps may include electrolessly depositing a layer uponthe microelectronic topography as well as process steps conducted priorto or subsequent to an electroless deposition process. However, themethod is not restricted to such process steps.

[0078] As noted in FIG. 3, the method may continue onto step 45 in whichthe gate is opened such that an air passage is provided to the processchamber. The microelectronic topography may then be exposed to a secondset of process steps without allowing liquids within the process chamberto flow through the air passage as indicated in step 46. In someembodiments, the second set of process steps may include drying themicroelectronic topography. In addition or alternatively, the second setof process steps may include any other process steps with which toprocess a microelectronic topography. In any case, the method mayfurther include removing the microelectronic topography from the processchamber subsequent to exposing the topography to the first and secondset of process steps as indicated in step 47. In cases in which theloading port of the process chamber is surrounded by the gate casingcomprising the gate, the step of removing may include moving the gatesuch that barriers of the gate do not block the opening of the processchamber.

[0079] Returning to FIG. 1, process chamber 22 may include substrateholder 48 with which to support a wafer. In particular, substrate holder48 may include platen 50 supported by shaft 52, which passes throughbase 25 of process chamber 22. Although substrate holder 48 is shown tohold a single wafer, other substrate holders configured to hold multiplewafers may be alternatively arranged included within process chamber 22.As such, process chamber 22 is not restricted to processing a singlewafer. Rather, process chamber 22 may be either adapted for batchprocessing (i.e., processing multiple wafers at once) or may be adaptedto process wafers sequentially (i.e., processing one wafer at a time).In any case, substrate holder 48 may be arranged such that a wafer maybe positioned horizontally as shown in FIG. 1. In other embodiments,substrate holder 48 may be arranged such that a wafer is positionedvertically. In yet other cases, substrate holder 48 may be arranged tohave wafers positioned at an angle between 0° and 90° relative to base25.

[0080] In either case, substrate holder 48 may be configured to rotate.In particular, the outer end of shaft 52 may be rigidly coupled to gearwheel 53, which may be driven into rotation by motor 54. Morespecifically, the output shaft of motor 54 may be coupled to gear wheel55 and gear wheels 53 and 55 may be interconnected via a synchronizationbelt 56 such that shaft 52 and, thus, substrate holder 48 may berotated. Such an adaptation to rotate may advantageously allow processfluids introduced into process chamber 22 to be uniformly distributedacross an entire wafer. As a result, the treatment performed upon thewafer may be more uniform. It is noted that the arrangement of thecomponents with which to rotate substrate holder 48 in FIG. 1 is merelyan exemplary configuration. As such, other configurations for rotatingsubstrate holders known in the microelectronic fabrication industry maybe used within system 20. In yet other embodiments, substrate holder 48may not be configured to rotate. Rather, process chamber 22 may includeother means with which to rotate a wafer. Alternatively, process chamber22 may not be configured to rotate a wafer at all.

[0081] In some cases, substrate holder 48 may be configured to secure awafer such that movement of the wafer relative to the substrate holderis minimized. An exemplary substrate holder having such a configurationis shown in FIG. 4. In particular, FIG. 4 illustrates a cross-sectionalview of substrate holder 48 securing wafer W above platen 50 by means ofclamping jaw 58. It is noted that illustration of the substrate holderin FIG. 4 is merely an exemplary configuration of a substrate holderthat may be included within the process chamber described herein. In noway is process chamber 22 is restricted to the inclusion of such aconfiguration. Consequently, process chamber 22 may additionally oralternatively include several other substrate holder configurations withwhich to support a wafer. For example, substrate holder 48 may, in someembodiments, include a vacuum-activated mechanism with which to secure awafer to the substrate holder.

[0082] As shown in FIG. 4, clamping jaw 58 may be arranged along theedge of substrate holder 48 such that the edge of wafer W is secured. Itis noted that clamping jaw 58 may be one of a plurality of clamping jawsarranged along the periphery of substrate holder 48, but only oneclamping jaw is shown in FIG. 4 to simplify the drawing. As such, insome embodiments, the substrate holder illustrated in FIG. 4 may alsoinclude a clamping jaw along the opposite edge of substrate holder,although substrate holder 48 is not restricted to such a configuration.In general, the number of clamping jaws to include within a substrateholder may depend on the size of the wafer to be processed and/or thetype of processing to be conducted within the process chamber. Forexample, in some cases, the number of clamping jaws may be optimizedsuch that a wafer may be secured without having superfluous number ofjaws with which to complicate the substrate holder configuration. Ingeneral, the plurality of clamping jaws may have a substantially similarconfiguration as clamping jaw 58. In addition, the plurality clampingjaws may be uniformly or non-uniformly arranged about the periphery ofsubstrate holder 48.

[0083] In some embodiments, clamping jaw 58 may be configured to securewafer W when platen 50 includes moveable platen 60 arranged above fixedbase platen 61. In other embodiments, however, the adaptations ofplatens 60 and 61 may be reversed. In particular, platen 50 may includea fixed platen arranged above a moveable platen. Although theconfiguration of clamping jaw 58 to secure wafer W upon substrate holder48 is described below in reference to platen 60 being moveable andplaten 61 being fixed, clamping jaw 58 is not restricted to such aconfiguration. In particular, clamping jaw 58 may be modified toaccommodate the alternative adaptations of platens 60 and 61. In thismanner, the concept of using a clamping jaw having the configurationdescribed herein may be used in either case.

[0084] In some embodiments, substrate holder 48 may be configured toreceive wafer W directly upon moveable platen 60. In yet otherembodiments, however, substrate holder 48 may be configured to supportwafer W above moveable platen 60. For example, in some embodiments,substrate holder 48 may include annular seal 62 arranged upon moveableplaten 60 and configured to receive wafer W, as shown FIG. 4. Such anannular seal may be used to seal the backside of wafer W to moveableplaten 60 such that process solutions used during treatment of the frontside of the wafer do not contaminate the backside of the wafer. In anycase, the area above moveable platen 60 and extending in from clampingjaw 58 to the other end of substrate holder 48 may be referred to as a“wafer receiving region,” as used herein. As shown in FIG. 4, shaft 52may include a central hole through which rod 63 may be inserted andconfigured to slide through. The upper end of rod 63 may be coupled tothe bottom of the movable platen 61 such that when an upward force isapplied to rod 63, moveable platen 60 may rise relative to fixed baseplaten 61 as shown in FIG. 4. In some embodiments, substrate holder 48may include pins 64 rigidly supported in fixed base platen 61 andslidingly inserted within openings of moveable platen 60. Such pins maybe configured to further support wafer W when moveable platen 60 islowered toward fixed base platen 61. In yet other cases, substrateholder 48 may not include pins.

[0085] In any case, clamping jaw 58 may be configured to move uponraising moveable platen 60 such that wafer W may be secured. Morespecifically, clamping jaw 58 may include lever 65 pivotally coupled tosupport member 66, which may be rigidly attached to fixed base platen61. In a preferred embodiment, lever 65 may include portion 67, which ispivotally coupled to support member 66, and portion 68 extending outwardfrom support member 66. In this manner, lever 65 may be tilted uponraising moveable platen 60. In some cases, portion 67 may be lighterand/or shorter than portion 68 to augment such a tilting motion. In yetother embodiments, however, there may not be a weight or lengthdistinction between portions 67 and 68. As shown in FIG. 4, portion 67may include lip 69 extending inward from support member 66. Upon tiltinglever 65, lip 69 may extend beyond the periphery of wafer W such thatvertical motion of the wafer is minimized or prohibited. In some cases,lip 69 may extend to a level spaced above wafer W. Such an adaptationmay be particularly advantageous for minimizing the amount of damagesustained to the edge of wafer W as shown in FIG. 4. In yet otherembodiments, however, lip 69 may come into contact with wafer W. Ineither case, support member 66 may be positioned such that the lateralmovement of wafer W is minimized. In this manner, the vertical andlateral movement of wafer W may be minimized through the use of clampingjaw 58.

[0086] Returning back to FIG. 1, system 20 may include one or moresupply lines with which to supply various fluids to process chamber 22.In addition, system 20 may include one or more reservoirs with which tostore such fluids. As noted above, process chamber 22 may be used forany microelectronic fabrication process, including but not limited to,depositing, etching, activating, polishing, cleaning, rinsing, drying,or any combination of such processes. As such, the various fluidssupplied to process chamber 22 may include any fluids, including liquidsand/or gases, used for the fabrication of a microelectronic device. Insome cases, however, the various fluids may be associated with processesthat treat a microelectronic topography prior to, during, and/orsubsequent to an electroless deposition process. For example, reservoir70 may include an electroless deposition solution, while auxiliary tanks72 a, 72 b, and 72 c may include fluids for the treatment of a waferprior to or subsequent to an electroless deposition process. Morespecifically, auxiliary tanks 72 a, 72 b, and 72 c may include variousfluids used for the activation, cleaning, rinsing, and/or drying of amicroelectronic topography prior to or subsequent to an electrolessdeposition process. In yet other embodiments, however, reservoir 70 andauxiliary tanks 72 a, 72 b, and 72 c may be used to store fluids formicroelectronic fabrication processes other than those associated withan electroless deposition process.

[0087] It is noted that system 20 is not restricted to theaforementioned designation of chemicals for reservoir 70 and auxiliarytanks 72 a, 72 b, and 72 c. In particular, reservoir 70 may include mayinclude any of the various fluids used for the activation, cleaning,rinsing, and/or drying of a microelectronic topography prior to orsubsequent to an electroless deposition. In addition, any of auxiliarytanks 72 a, 72 b, and 72 c may include a deposition solution.Furthermore, system 20 may be adapted to provide additional depositionsolutions to process chamber 22 in some embodiments. In particular,system 20 may include a plurality of reservoirs and supply lines forsupplying deposition solutions to process chamber 22, includingsolutions for electroless deposition and non-electroless deposition. Inthis manner, process chamber 22 may be used for depositing differentmaterials upon a wafer without having to take the wafer out of thechamber.

[0088] As shown in FIG. 1, reservoir 70 and auxiliary tanks 72 a, 72 b,and 72 c may be coupled to inlet ports of process chamber 22 via supplylines. In particular, reservoir 70 may be coupled to supply line 74 andauxiliary tanks 72 a, 72 b, and 72 c may be coupled to supply lines 76a, 76 b, and 76 c. In some cases, reservoir 70 may be further coupled tosupply line 75, which is connected to the bottom of the process chamber22. Such an additional supply line may offer an alternative method oradditional means with which to introduce the fluid from reservoir 70.For example, supply line 75, in some embodiments, may be coupled to aninlet adapted to indirectly project a fluid on a wafer residing onsubstrate holder 48. Such an adaptation is described in more detailbelow with reference to the means for distributing fluids into processchamber 22.

[0089] In some cases, system 20 may include supply lines other than theones coupled to reservoir 70 and auxiliary tanks 72 a, 72 b, and 72 c.For example, system 20 may include supply line 78 for supplying arinsing solution, such as deionized water, to process chamber 22. Inaddition or alternatively, system 20 may include one or more supplylines, such as supply line 80, for supplying a compressed gas to processchamber 22. In some embodiments, the compressed gas may be inert and maybe used to simply further pressurize process chamber 22 as discussed inmore detail below. In yet other embodiments, supply line 80 may be usedto supply a chemical reagent gas with which to process the wafer. Insome cases, a plasma may be generated within process chamber 22 usingthe reagent gas. In such an embodiment, process chamber 22 may includean ionizing coil with which to form the plasma. In yet otherembodiments, a wafer may be treated with reagent gas in its gas phase.

[0090] Consequently, the reference of “fluids” to process amicroelectronic topography, as used herein, may refer to liquids, gases,or plasmas, including gases in a standard state or an excited state(i.e., a photon-activated gas state). The fluids in any of such statesof matter may be used at pressures below, at, or above atmosphericpressure as well as at temperatures associated with the respectiveprocess step of the fabrication process. In any case, the fluidintroduced through supply line 80 may, in some embodiments, be used todry a wafer arranged within process chamber 22. In yet otherembodiments, supply line 80 may not be used to dry a wafer. In any case,supply lines which are coupled to a moving part of process chamber 22,such as cover 24, for example, the supply lines may be made in the formof hoses or other flexible pipings.

[0091] Although supply lines 78 and 80 are shown coupled to cover 24 inFIG. 1, supply lines 78 and 80, as well as supply lines 74, 75, 76 a, 76b, and 76 c may be coupled at any location along process chamber 22. Inaddition or alternatively, supply lines 78 and 80 may be coupled toother inlets of process chamber 22. For example, supply line 78 may beadditionally or alternatively coupled to dispensing arm 94 as shown inFIG. 1. Furthermore, although supply lines 78 and 80 are specificallyreferenced as respectively supplying a rinsing solution and compressedgas to process chamber 22, the lines are not restricted to such afunction. Rather, supply lines 78 and 80 may be used to supply any typeof fluid to process chamber 22. In yet other embodiments, supply lines78 and/or 80 may be omitted from process chamber 22. Similarly, any ofsupply lines 74, 75, 76 a, 76 b, and 76 c may be used to supply any typeof fluid to process chamber 22 or may, alternatively, be omitted fromprocess chamber 22.

[0092] In either case, the processes conducted within process chamber 22may include single or multi-phase operations. More specifically, theprocesses conducted within process chamber 22 may employ a single phaseoperation, such as one primarily comprising a liquid, a gas, or aplasma. Alternatively, the processes conducted within process chamber 22may use a multi-phase operation, having a combination of liquid, gas,and/or plasma. In some embodiments, employing a single liquid phaseenvironment may offer a manner with which to control the pressure withinprocess chamber 22. The benefits of controlling pressure within processchamber 22 is described in more detail below. In general, however,increasing the pressure within process chamber 22 will increase theboiling point of a solution used within the chamber and may consequentlyincrease the reaction rate of the process within process chamber 22.

[0093] A method for electrolessly depositing a layer upon amicroelectronic topography in single liquid phase environment isillustrated in FIG. 5. In general, the method may include loading themicroelectronic topography into an electroless deposition chamber andsealing the deposition chamber to form an enclosed area about thetopography as shown in steps 82 and 83, respectively. The method maycontinue to step 84 in which the entirety of the enclosed area is filledwith a deposition solution such that no gas is present. In particular,the step of filling may include introducing the deposition solution at afirst inlet flow rate and narrowing one or more outlet passages of theelectroless deposition chamber such that a composite first dispensingflow rate of the deposition solution through the outlets is less thanthe first inlet flow rate. In general, the flow rates of the fluid inthe inlet passages and outlet passages may be controlled by a fluid flowcontroller coupled to process chamber 22. It is noted that the firstinlet flow rate may be introduced through one or more inlets of thechamber. Such a process of filling may pressurize the enclosed area to apressure between approximately 5 psi and approximately 100 psi,increasing the boiling point of the deposition solution. In someembodiments, the method may include heating the deposition solution to atemperature less than approximately 25% below the boiling point of thedeposition solution to increase a reaction rate of the depositionsolution with the microelectronic topography. Consequently, pressurizingthe enclosed area of the process chamber may, in some embodiments, aidin increasing the deposition rate of the process.

[0094] In any case, the method may, in some embodiments, includereplenishing the deposition solution within the enclosed area as shownin step 85. Such a step of replenishing may, in some embodiments,include widening one or more outlet passages of the process chamber suchthat a composite second dispensing flow rate of the deposition solutionthrough the outlets is substantially equal to the first inlet flow rateof the deposition solution. Alternatively, the step of replenishing mayinclude decreasing the first inlet flow rate of the deposition solutionto a second inlet flow rate that is substantially equal to the firstdispensing flow rate of the deposition solution through outlets of theprocess chamber. In yet other embodiments, the step of replenishing mayinclude decreasing the first inlet flow rate of the deposition solutionto the process chamber to a second inlet flow rate and widening one ormore of the outlet passages to a composite second dispensing flow rate,wherein the composite second dispensing flow rate is substantially equalto the second inlet flow rate.

[0095] An exemplary configuration of process chamber 22 adapted toexpose a microelectronic topography to a single phase process isillustrated in FIGS. 6a-6 d. As noted above, process chamber 22 may beadapted to perform a succession of different process steps. As such,although process chamber 22 is shown in FIG. 6a-6 d without any of theauxiliary components described in reference to FIG. 1, the processchamber shown in FIG. 6a-6 d may be coupled to such components. Inparticular, the process chamber 22 illustrated in FIGS. 6a-6 d may becoupled to supply lines, exhaust lines, temperature and pressure gaugesand controls, storage tanks, and a CPU unit. In addition oralternatively, the process chamber illustrated in FIG. 6a-6 d mayinclude a plurality of input ports, such as but not limited to showerelement 92 and dispensing arm 94. The exclusion of such componentswithin FIGS. 6a-6 d is merely to simplify the illustration of thedrawings and, therefore, does not necessarily indicate the absence ofsuch components. Consequently, the process chamber illustrated in FIG.6a-6 d is not necessarily restricted to processing a microelectronictopography solely with the use of a reservoir as described in moredetail below. Rather, the description of process chamber 22 in referenceto FIGS. 6a-6 d simply offers one method of a plurality of methods withwhich to treat a topography within the process chamber.

[0096] Substrate holder 48 is shown within process chamber 22 in FIG.6a-6 d to aid in describing the adaptations of the chamber. Such asubstrate holder may be substantially similar to the substrate holderdepicted in FIG. 1 and, therefore, may include similar components andadaptations of the holder as described above. As shown in FIG. 6a,process chamber 22 may include reservoir 170 arranged above substrateholder 48. Alternatively, reservoir 170 may be arranged below substrateholder 48. In such an embodiment, process chamber 22 may be adapted tohave wafer W arranged “face down” for processing. In other words,substrate holder 48 may be adapted to holder wafer W in a manner suchthat the side of the wafer to be treated is facing reservoir 170. In yetanother embodiment, reservoir 170 and substrate holder 48 may beoriented perpendicular to the arrangement shown in FIGS. 6a-6 d. Inparticular, substrate holder 48 may be oriented such that the uppersurface of the substrate holder is parallel with the sidewalls ofprocess chamber 22. In this manner, wafer W may be arranged verticallywithin process chamber 22. In such an embodiment, reservoir 170 may bearranged to the right or left of substrate holder 48. Consequently,process chamber 22 may be adapted to move reservoir 170 in a horizontaldirection in such a case.

[0097] In any case, reservoir 170 may be adapted to hold a fluid forprocessing a microelectronic topography. In some cases, the fluid may bea single phase fluid, such as a liquid or a gas. In other embodiments,however, reservoir 170 may be adapted to hold multi-phase fluids. Ineither case, process chamber 22 may be adapted to replenish the fluidwithin reservoir 170 such that fluid may retain its processingproperties. For example, in some cases process chamber 22 may includeinlet 176 and outlet 178 coupled to reservoir 170. In some embodiments,the fluid may be recycled through such an inlet and outlet. In any case,the replenishing of the fluid in reservoir 170 may be conducted priorto, during, or subsequent to a processing step of the chamber.

[0098] In some embodiments, process chamber 22 may be adapted to movereservoir 170 relative to substrate holder 48 as noted by thebi-directional arrow in FIG. 6a. In particular, process chamber 22 mayinclude moveable shaft 171 to which reservoir 170 is attached, or morespecifically, hatch 172 of reservoir 170 is attached. In someembodiments, process chamber 22 may be adapted to position reservoir 170in contact with substrate holder 48 as shown in FIG. 6b. In otherembodiments, however, process chamber 22 may be adapted to positionreservoir 170 upon a microelectronic topography residing on substrateholder 48. In either case, the adaptation of process chamber 22 to movereservoir 170 toward substrate holder 48 may allow an enclosed area tobe formed about a portion of substrate holder 48, particularly in anarea in which a microelectronic topography may be arranged. In thismanner, process chamber 22 may be adapted to position reservoir 170proximate to substrate holder 48 such that a fluid stored in reservoir170 may be used to process a microelectronic topography arranged uponthe substrate holder.

[0099] As shown in FIG. 6b, process chamber 22 may be further adapted toraise hatch 172 of reservoir 170 as well as open valves 174 of reservoir170 upon positioning the reservoir proximate to substrate holder 48.Consequently, the transition between FIGS. 6a and 6 b may illustrate themovement of reservoir 170 as a whole toward substrate holder 48 and FIG.6b may illustrate the raising of hatch 172 and the opening of valves174. In an alternative embodiment, hatch 172 may be adapted to openrather than be raised. In particular, hatch 172 may include a shutterwindow aligned with the region of substrate holder 48 upon which a wafermay be arranged. In any case, raising and/or opening hatch 172 may allowa microelectronic topography arranged upon substrate holder 48 to beexposed to fluid stored within reservoir 170, allowing treatment of themicroelectronic topography to start. Opening valves 174 may additionallyor alternatively serve to expose a wafer to a fluid stored withinreservoir 170. In general, the treatment process conducted withinprocess chamber 22 may include any process step of a fabricationsequence for a microelectronic device, including but not limited toetching, depositing, cleaning, activating, and/or drying. In someembodiments, the configuration of process chamber 22 may be particularlyadvantageous for an electroless deposition process.

[0100] In any case, hatch 172 may be formed from a polymer or any othermaterial used in microelectronic fabrication for reservoirs. In someembodiments, hatch 172 may made of a permeable material, such assynthetic membranes, such that ions within the fluid of reservoir 170may be distributed upon wafer W when hatch 172 is aligned with the baseof reservoir 170. Such a configuration may be particularly advantageousfor embodiments in which an electroless deposition process is conductedwithin process chamber 22. In some embodiments, hatch 172 may furtherinclude a polymer shutter window to prevent the distribution of ionsthrough the permeable material for processes conducted prior to orsubsequent to the electroless deposition process. In any case, hatch 172may be configured to have a length (e.g. a diameter) which allows asubstantial portion of a wafer arranged upon substrate holder 48 to beexposed to a fluid stored within reservoir 170. For example, in somecases, latch 172 may include a length which is substantially similar tothe diameter of a wafer as shown in FIG. 6b. In other embodiments,however, latch 172 may have a length which is longer than the diameterof a wafer. In general, hatch 172 may have a plan view of any shape,including but not limited to circles and rectangles.

[0101] Prior to the raising hatch 172, the hatch may be detached fromthe sidewalls of reservoir 170 to allow the reservoir to remainproximate to substrate holder 48. In other cases, however, processchamber 22 may not be adapted to raise hatch 172 or hatch 172 may beomitted from reservoir 170. In such an embodiment, exposing fluid storedwithin reservoir 170 to a microelectronic topography arranged uponsubstrate holder 48 may be solely achieved by opening valves 174. In yetother embodiments, process chamber 22 may not be adapted to open valvesor valves 174 may be omitted from reservoir 170. In such a case,exposing fluid stored within reservoir 170 to a microelectronictopography arranged upon substrate holder 48 may be solely achieved byraising hatch 172. Consequently, in some cases, process chamber 22 maybe adapted to only raise hatch 172 or open valves 172. In addition,although FIGS. 6a-6 d illustrate reservoir 170 including two valves, anynumber of valves may be included within reservoir 170. Consequently,process chamber 22 is not restricted to the configurations depicted inFIGS. 6a-6 d.

[0102] As shown in FIG. 6c, process chamber 22 may be adapted tocontinue raising hatch 172. In general, hatch 172 may be raised to anyposition within reservoir 170. In some embodiments, it may beparticularly advantageous to raise hatch 172 to a level mid-way withinreservoir 170 when hatch 172 is used to mix and/or agitate the fluidwithin the reservoir. In this manner, hatch 172 may be sufficientlydistanced from the chamber walls of reservoir 170. In other cases,however, hatch 172 may be raised to a level other than the mid-wayposition within reservoir 170 without disturbing the sidewalls of thereservoir. In any case, process chamber 22 may be adapted to agitate thefluid stored within reservoir 170. In particular, process chamber 22 maybe adapted to cause a sufficient amount of motion within reservoir 170to prevent the accumulation of bubbles upon the microelectronictopography. In some embodiments, the adaptation to agitate the fluid mayinclude an adaptation to rotate hatch 172. More specifically, processchamber 22 may be adapted to turn shaft 171 such that hatch 172 attachedthereto may be rotated. It is noted that other agitation mechanismsknown in microelectronic fabrication or described herein may also oralternatively be used to agitate the fluid within reservoir 170,depending on the design specifications of the process chamber. In anycase, the agitation of the fluid within reservoir 170 may be conductedduring or subsequent to raising hatch 172.

[0103] Upon completion of the fabrication process step, hatch 172 may belowered back down to be in alignment with the base of reservoir 170 asshown in FIG. 6d. In particular, process chamber 22 may be adapted tomove shaft 171 such that hatch 172 is proximate to substrate holder 48.Upon lowering hatch 172, fluid may be forced back through valves 174 asshown in FIG. 6d. In this manner, reservoir 170 may retain the processfluid used to treat the microelectronic topography. Subsequent tolowering hatch 172 to be in alignment with the base of reservoir 170,hatch 172 may be coupled to the base and reservoir 170 may be raised toa level spaced above substrate holder 48. In this manner, the waferarranged upon substrate holder 48 may be removed from process chamber 22and a new wafer may be loaded therein.

[0104] Returning to FIG. 1, system 20 may include auxiliary equipment tofurther enhance the introduction of fluids to process chamber 22. Forexample, in some embodiments, system 20 may be adapted to control theflow rate and time at which a fluid is supplied to process chamber 22.As such, supply lines 74, 75, 76 a, 76 b, 76 c, 78 and 80 may includesolenoid valves in some cases. Operation of the solenoid valves as wellas other components within system 20 may be controlled through centralprocessing unit (CPU) 106 as described in more detail below. In someembodiments, system 20 may include heaters, coolers, and thermocouplesfor regulating the temperature of a fluid introduced into processchamber 22. In fact, it may be particularly advantageous to regulate thetemperature of a solution used for an electroless deposition process.Typically, the deposition rate of an electrolessly deposited materialincreases with increases in temperature. Some electroless depositionsolutions, however, tend to decompose at or near their boiling point,causing a material to be non-uniformly deposited or not deposited atall. As such, supply line 74 may, in some embodiments, includetemperature control unit 86, which is adapted to heat and monitor thetemperature of the solution routed for reservoir 70. In some cases,process chamber 22 may further include temperature sensor 87 installedin solution return line 88 and communicably coupled to temperaturecontrol unit 86. In yet other cases, reservoir 70 and/or supply line 75may additionally or alternatively include a temperature sensor or atemperature control unit.

[0105] In general, the temperature of an electroless deposition solutionduring processing may be between approximately 16° C. and approximately120° C. However, in some cases, an electroless deposition solution maybe maintained at a temperature, which is approximately 25% or less belowits boiling temperature. Maintaining an electroless deposition solutionat such a temperature may maximize the deposition rate of the process insome embodiments. In yet other embodiments, an electroless depositionsolution may be maintained at room temperature in order to maximize theuniformity of the deposition. It is noted that although theaforementioned temperature controls are discussed in reference tomonitoring and heating a supply line or tank for an electrolessdeposition solution, the control devices may be used for regulating thetemperature of any fluid introduced into process chamber 22. As such,process chamber 22 may, in some embodiments, additionally oralternatively include temperature control devices within auxiliary tanks72 a, 72 b, 72 c and/or supply lines 76 a, 76 b, 76 c, 78, 80.

[0106] In some embodiments, system 20 may additionally or alternativelybe adapted to heat and/or cool substrate holder 48. Such an adaptationmay be particularly advantageous for improving the deposition rate anduniformity of an electroless deposition process. For example, heatingsubstrate holder 48 and, thus, the wafer residing thereon, during adeposition process may advantageously increase the deposition rate of aprocess. In such an embodiment, the relatively high deposition rate maybe realized while the electroless deposition solution is supplied toprocess chamber 22 at a relatively low temperature, preventing thesolution from decomposing. In addition, an adaptation to cool asubstrate may offer a manner with which to immediately terminate adeposition process and, thus, allow for more control over the amountdeposited upon the substrate. For an efficient deposition of metals froman electroless deposition solution, the temperature on the surface ofthe wafer supported upon substrate holder 48 may be maintained betweenapproximately 16° C. and approximately 120° C. Larger or smallersubstrate temperatures, however, may be used, depending on the materialto be deposited.

[0107] In some embodiments, the adaptation to heat and/or cool a wafermay be incorporated within substrate holder 48. In particular, anelectric heater and/or a circulation-fluid cooler may be built into thebody of substrate holder 48. In yet other embodiments, substrate holder48 may include a Peltier-type cooler/heater which is adapted to servethe dual roles of heating and cooling the substrate holder. Inparticular, the Peltier-type cooler/heater may include a package of twosemiconductor plates that operate on the principle of generating heatwhen current flows in one direction and absorbing heat when currentflows in the opposite direction. Descriptions and illustrations ofmechanisms used to heat and/or cool a substrate holder may be found inU.S. patent application Ser. No. 10/242,331 and is incorporated byreference as if fully set forth herein.

[0108] As noted above, the components lining chamber walls 23, cover 24,and base 25 may be adapted to hermetically seal process chamber.Consequently, process chamber 22 may be pressurized in some embodiments.In some cases, it may be advantageous to regulate the pressure withinprocess chamber 22 and, therefore, in some embodiments, process chamber22 may include pressure sensor 89. Although pressure sensor 89 is shownarranged within supply line 80 in FIG. 1, pressure sensor 89 may belocated within any other supply line of system 20 or within processchamber 22. In some embodiments, it may be advantageous to pressurizeprocess chamber 22 to a predetermined value through the use of supplylines 74, 75, 76 a, 76 b, 76 c, 78, 80, and/or outlets of the processchamber. In particular, it may be advantageous to pressurize processchamber 22 to a level, such as between approximately 5 psi andapproximately 100 psi, or more specifically, to approximately 50 psi.Larger or smaller values of pressure may be generated within processchamber 22, however, depending on the process parameters of the devicebeing fabricated and the operational parameters of system 20. Ingeneral, increasing the pressure within process chamber 22 may increasethe boiling point of the fluids supplied to the chamber duringprocessing of a wafer in the chamber. As noted above, the depositionrate of an electroless deposition solution typically increases withincreases in temperature, but tends to decompose at or near its boilingpoint, causing a material to be non-uniformly deposited or not depositedat all. As such, increasing the pressure within process chamber 22 mayadvantageously allow a material to be deposited faster and, in somecases, more uniformly.

[0109] In addition to increasing the boiling point of a processingfluid, increasing the pressure within process chamber 22 mayadvantageously minimize the generation of bubbles upon a wafer duringprocessing. In particular, increasing the pressure within processchamber 22 may decrease the generation of hydrogen atoms within thereaction of the electroless deposition process, thereby decreasing thenumber of bubbles to accumulate upon the wafer being processed withinthe chamber. As noted above, the accumulation of bubbles upon a wafersurface during processing may undesirably cause a microelectronictopography to be processed non-uniformly, potentially producing devicefeatures with dimensions out of the design specification of the device.In some cases, a microelectronic topography may be wetted with a fluidcomprising a surfactant prior to exposing the topography to the fluidswith which to process the topography to reduce the accumulation ofbubbles on the surface of the topography. For example, a microelectronictopography may be wetted with a fluid comprising polyethylene glycolsuch that unwettable portions of the topography may be transposed intoportions adapted to be wetted by subsequent processing fluids.Increasing the wettability of the microelectronic surface mayadvantageously reduce the generation and accumulation of bubbles uponthe microelectronic topography during processing.

[0110] Another manner with which to minimize the accumulation bubbles ona wafer during processing is to agitate the fluid used to process thewafer. Consequently, in some embodiments, process chamber 22 may includea means with which to agitate fluids supplied to the chamber. Forexample, process chamber 22 may include means 90 arranged within processchamber 22 as shown in FIG. 1. In particular, means 90 may be arrangedat a level above substrate holder 48. Alternatively, means 90 may bearranged at a level below substrate holder 48. In yet other embodiments,means 90 may be coupled to substrate holder 48. In some cases, means 90may include a transducer adapted to provide acoustic waves to a fluidused to process a wafer within the chamber. For example, the transducermay be adapted to provide ultrasonic or megasonic waves. In either case,the transducer may be arranged such that the acoustic waves arepropagated parallel or perpendicular to a treating surface of the wafer.In yet other embodiments, the transducer may be arranged such that theacoustic waves are propagated at an angle between approximately 0° andapproximately 90° relative to a treating surface of the wafer. The“treating surface” of a wafer, as used herein, may refer to the surfaceof the wafer at which fluids are introduced to fabricate features uponthe wafer. Although means 90 is shown arranged within process chamber 22in FIG. 1, process chamber 22 may additionally or alternatively includea transducer within any of the supply lines coupled to process chamber22. In yet other embodiments, process chamber 22 may not include atransducer with which to provide acoustic waves.

[0111] In any case, means 90 may, in some embodiments, additionally oralternatively include a device configured to move across an enclosedregion of process chamber 22. More specifically, means 90 may include adevice configured to move across the region directly above substrateholder 48. In this manner, the device may be configured to move across awafer being processed within process chamber 22. In some embodiments,the device may be configured to come into contact with the wafer. Inother embodiments, however, the device may be configured to not comeinto contact with the wafer. In particular, the device may be configuredto traverse the enclosed region at a level spaced above the wafer whencontact with the device may cause damage to the wafer. In someembodiments, the device may be configured to distribute one or morefluids toward substrate holder 48 such that a wafer may be processed. Inthis manner, the device may serve as a fluid inlet to process chamber22. In some cases, it may be particularly advantageous for the device todeliver fluids at a rate sufficient to eliminate the “loading effect”during processing. The “loading effect,” as used herein, may refer tothe higher rate of consumption of active components within a fluid inhigh density areas of a wafer as compared to the rate of consumption inareas with a lower density of features. For example, sulfuric acid maybe consumed faster in a region comprising a high density of copperinterconnects as compared to a region of a wafer comprising a few or nocopper interconnects. In yet other cases, the device may not be adaptedto dispense a fluid, but rather, may simply be used to agitate the fluidabove substrate holder 48.

[0112] In any case, the device may include any mechanism which may causea sufficient amount of agitation with which to remove and/or prevent theaccumulation of bubbles on the surface of the underlying wafer. In apreferred embodiment, the adaptation to agitate may be sufficient tocause laminar agitation rather than turbulent agitation. Turbulentagitation may undesirably cause processing to be non-uniform across awafer, while laminar agitation may be sufficient to remove and/orprevent the accumulation of bubbles on the wafer surface and not affectthe uniformity of the process. As noted above, the device may beconfigured to dispense one or more fluids. Such an adaptation may beused to agitate the fluid above substrate holder 48 in some embodiments.Other manners for agitating the fluid, however, may additionally oralternatively be used. For example, in some embodiments, the device mayinclude a brush with a plurality of bristles to stir the fluid withinprocess chamber 22. Alternatively, the device may simply include asingle rod, block, or plate. In some embodiments, the device may includea propeller. In this manner, a high fluid flow rate may be induced aboutthe substrate surface without utilizing a complex system of highpressure pumps and tubing. Consequently, it is noted that the device mayinclude any design and may traverse at any speed sufficient to cause adisturbance with which to minimize the number of bubbles of a wafersurface. In yet other cases, however, process chamber 22 may not includesuch a device.

[0113] Regardless of whether means 90 includes the aforementioned deviceor a transducer, means 90 may offer a means of agitating a fluid withinprocess chamber 22 that is distinct from the inlets used to supply thefluid. As will be described in more detail below, fluids may beintroduced into process chamber 22 through either shower element 92,dispense arm 94, or any other inlet ports coupled to supply lines 74,75, 76 a, 76 b, 76 c, 78, and/or 80. As such, means 90 may offer amanner with which to agitate process fluids which are independent fromshower element 92, dispense arm 94, and/or any other inlet ports coupledto supply lines 74, 75, 76 a, 76 b, 76 c, 78, and/or 80. In someembodiments, however, process chamber 22 may not include means 90.

[0114] In any case, shower element 92, dispense arm 94, and/or the inletports coupled to supply lines 74, 75, 76 a, 76 b, 76 c, 78, and/or 80may additionally or alternatively serve to agitate a process fluidarranged within process chamber 22. More specifically, shower element92, dispense arm 94, and/or the inlet ports coupled to supply lines 74,75, 76 a, 76 b, 76 c, 78, and/or 80 may, in some embodiments, be adaptedto introduce a fluid into process chamber 22 at a sufficient rate withwhich to agitate the fluid within the chamber. For example, in someembodiments, shower element 92, dispense arm 94, and/or the inlet portscoupled to supply lines 74, 75, 76 a, 76 b, 76 c, 78, and/or 80 may beadapted to introduce a fluid at a rate between approximately 0.01gallons per minute (gpm) and approximately 10 gpm, or more specifically,between approximately 0.1 gpm and approximately 10 gpm. However, largeror smaller flow rates may be used, depending on the process parametersof the device being fabricated and the operational parameters of system20. In addition or alternatively, shower element 92, dispense arm 94,and/or the inlet ports coupled to supply lines 74, 75, 76 a, 76 b, 76 c,78, and/or 80 may be adapted to pulse the introduction of a fluid intoprocess chamber 22. Such a pulsation may be at a frequency betweenapproximately 0.1 Hz and approximately 10 Hz, or more specifically,between approximately 1.0 Hz and approximately 10 Hz. Larger or smallerfrequencies may be used, however, depending on the process parameters ofthe device being fabricated and the operational parameters of system 20.

[0115] Regardless of the method used to agitate a fluid within processchamber 22, the motion created within process chamber 22 is preferablysufficient to minimize the generation and/or accumulation of bubbles ona wafer surface. As noted above, reducing the number of bubbles upon awafer surface during treatment of the wafer may significantly improvethe uniformity of the treatment on the wafer surface. Consequently, theprocess of agitating a fluid may result in a wafer feature havingsubstantially uniform dimensions. For example, a deposition solutionused to deposit a layer upon a wafer may be agitated to create an amountof motion sufficient to form a layer having substantially uniformthickness across the wafer. Since an electroless deposited material maybe particularly susceptible to non-uniformity with the presence ofbubbles, process chamber 22 may, in some cases, be specifically adaptedto agitate a deposition solution supplied to the chamber. In particular,means 90, shower element 92, dispense arm 94, and/or the inlet portscoupled to supply lines 74, 75, 76 a, 76 b, 76 c, 78, and/or 80 may beprogrammed to use their agitation adaptations when a deposition solutionis being introduced into process chamber 22. In some cases, means 90,shower element 92, dispense arm 94, and/or the inlet ports coupled tosupply lines 74, 75, 76 a, 76 b, 76 c, 78, and/or 80 may be adapted toagitate other solutions associated with the fabrication of amicroelectronic device as well.

[0116] Consequently, a method for minimizing the accumulation of bubblesupon a wafer during an electroless deposition process is providedherein. Such a method is depicted in FIG. 7 and may include any or allof the process parameters listed for the components used to agitate afluid within process chamber 22 as described above. As shown in FIG. 7,the method may include step 95 in which a wafer is loaded into anelectroless deposition chamber. In some embodiments, the wafer may beloaded such that the wafer is face-up in the electroless depositionchamber. In general, “face-up,” as used herein, may refer to theorientation of a wafer having a surface to be treated facing upward, ormore specifically, facing the top of a chamber. In turn, “face-down,” asused herein, may refer to the orientation of a wafer having a surface tobe treated facing downward, or more specifically, facing the bottom of achamber. Such an orientation may advantageously reduce the accumulationof bubbles upon the wafer surface. The method depicted in FIG. 7 is not,however, restricted to loading a wafer in such an orientation. As such,in other embodiments, the method may include loading the waferface-down. In such an embodiment, the process steps of pressurizing thechamber and/or agitating the process fluid, as described in more detailbelow, may serve to minimize the generation and accumulation of bubbleson the wafer surface.

[0117] In any case, the method may further include sealing theelectroless deposition chamber to form an enclosed area about the waferas shown in step 96. As noted above, such a sealing process may serve topressurize a chamber. In some embodiments, however, the method mayinclude pressurizing the enclosed area to a predetermined value as notedin step 97. Such a predetermined value may be between approximately 5psi and approximately 100 psi, or more specifically, approximately 50psi. Larger or smaller pressures may be generated, however, depending onthe process parameters of the device being fabricated and theoperational parameters of system 20. In general, pressurizing thechamber to such values may be accomplished by introducing fluids intothe chamber and restricting flow from the outlets of the chamber.

[0118] As noted above, pressurizing the chamber may advantageouslyreduce the generation and accumulation of bubbles on a wafer surfaceduring processing. As such, the steps of agitating the depositionsolution and pressurizing the chamber may collectively reduce the amountof bubbles formed upon the wafer during the electroless depositionprocess. In embodiments in which the wafer is loaded face-up, the methodmay collectively offer three manners with which to reduce the amount ofbubbles formed upon the wafer during the electroless deposition process.In yet other embodiments, step 97 may be omitted from the methoddepicted in FIG. 7. In such an embodiment, the step of agitating mayexclusively serve to minimize the generation and accumulation of bubblesupon a wafer surface or may collectively serve such a function when thewafer loaded face-up and/or the wafer is prewetted as described inreference to step 97 a.

[0119] As shown in FIG. 7, the method may, in some embodiments, includestep 97 a in which the wafer is prewetted. Such a step may includeintroducing a substantially neutral solution to the wafer such that dryspots or areas with surface irregularities may be wetted to prevent theformation of bubbles at such locations. In yet other embodiments, step97 a may be omitted from the method. In any case, the method may furtherinclude supplying a deposition solution to the enclosed area andagitating the deposition solution as shown in steps 98 and 99,respectively. As noted above, agitating step 99 preferably includescreating a sufficient amount of motion such that a layer having asubstantially uniform thickness may be fabricated. Such a step mayinclude using any of the means for agitating a solution described above,including exposing the deposition solution to acoustic waves, moving adevice above and across a wafer, and/or distributing fluid continuouslyor in a pulsing sequence through any of the fluid inlets coupled to thechamber.

[0120] As noted above, fluids may be supplied to process chamber 22through shower element 92, dispense arm 94, means 90 and/or any of theinlet ports coupled to supply 74, 75, 76 a, 76 b, 76 c, 78, and/or 80.The fluids may include those used for any fabrication process of amicroelectronic topography, including processes used for depositing,etching, cleaning, polishing, and/or drying a topography. In someembodiments, the fluids may be further used to clean and/or dry theinterior of process chamber 22. In particular, the inlet ports ofprocess chamber 22 may be adapted to distribute fluids such that theinterior surfaces of dry cover 24, sidewalls 23, and base 25 may becleaned and/or dried. In some cases, the chamber walls may be cleanedand/or dried while a topography arranged upon substrate holder 48 iscleaned and/or dried, reducing production down time to clean thechamber. In any case, the fluid inlets of process chamber 22 may beadapted to supply one or more fluids to the process chamber. Inparticular, the fluid inlets may be adapted to supply fluidssimultaneously or sequentially into process chamber 22.

[0121] In general, shower element 92 may be adapted to dispense a fluidas a spray extending across nearly the entire wafer. In this manner, thefluid may be dispensed across the entire wafer. As shown in FIG. 1,shower element 92 may be centrally positioned above substrate holder 48.Such a position of shower element 92 along with rotation of substrateholder 48 may insure a uniform distribution of fluid across a wafer,although a fluid can be uniformly distributed with shower element 92 inother locations as well. As such, process chamber 22 is not restrictedto having shower element 92 in the location depicted in FIG. 1. Inparticular, shower element 92 may be alternatively positioned at otherlocations within process chamber 22. “Spray,” as used herein, may referto a stream of finely divided streams, particles, or droplets. As such,shower element 92 may include one or more nozzles adapted to distributea fluid at a high enough pressure such that a spray is generated. Inaddition or alternatively, shower element 92 may include a disc uponwhich fluid is introduced and distributed over the sides. In eithercase, shower element 92 may be alternatively adapted to distribute afluid such that its stream is not divided into separate streams ordroplets.

[0122] As noted above, process chamber 22 may further or alternativelyinclude dispensing arm 94. FIG. 1 shows dispensing arm 94 extendingabove a portion of substrate holder 48. In other embodiments, however,dispensing arm 94 may extend across the entire wafer. In either case,the fluid introduced through dispensing arm 94 may be uniformlydistributed across a wafer by rotating the wafer. In yet otherembodiments, dispensing arm 94 may be configured to distribute across anentirety of a wafer without rotating the wafer. In yet other cases,dispensing arm 94 may be configured to distribute a fluid upon a portionof the wafer. In any case, dispensing arm 94 may include a one or moreoutlets with which to distribute a fluid across a wafer. In particular,dispensing arm 94 may include a plurality of outlets spaced along thearm and directed toward substrate holder 48. Alternatively, dispensingarm 94 may include a single outlet, near the end of the arm extendingabove substrate holder 48, for example. In either case, the outletswithin dispensing arm 94 may, in some embodiments, include nozzles suchthat a fluid may be introduced as a spray from the arm. In yet otherembodiments, the outlets may include openings which allow the fluid tobe introduced upon a wafer in a non-spray manner.

[0123] In some cases, dispensing arm 94 may be configured to move. Morespecifically, dispensing arm 94 may be configured to move from aposition above substrate holder 48 to a location adjacent to thesubstrate holder. For example, one end of dispensing arm 94 may beconnected to a respective rotary drive mechanism arranged adjacent tosubstrate holder 48 such that the arm may pivot at such a location. Suchan adaptation may allow the wafer to be more easily loaded into processchamber 22. More specifically, the moveable adaptation of dispensing arm94 may allow a wafer to be loaded into process chamber 22 without beingdamaged. In addition, such a moveable adaptation may allow dispensingarm 94 to deliver a fluid to a specific area of the wafer, therebyproviding variable exposure of a process fluid to the wafer.

[0124] In some embodiments, shower element 92 may be used to distributea deposition solution, while dispensing arm 94 may be used to distributefluids for processes prior to or subsequent to a deposition process. Forexample, in some cases, dispensing arm 94 may be used to distributefluids for activation, cleaning, rinsing and/or drying a wafer. Theprocess chamber described herein, however, is not restricted to such aconfiguration. In particular, shower element 92 and dispensing arm 94may be used to distribute any fluid for any process used to fabricate amicroelectronic device. In addition, shower element 92 and dispensingarm 94 may be used to distribute fluids for the same process and,therefore, may distribute fluids simultaneously in some cases.Furthermore, one or both of shower element 92 and dispensing arm 94 maybe used for distributing fluids for all processes conducted in processchamber 22. In some cases, fluids may be supplied to process chamber 22by inlets other than by shower element 92 and dispensing arm 94. Inparticular, fluids may be supplied to process chamber 22 by any inletcoupled to a fluid supply line. In general, the inlets may be positionedat any location within process chamber 22. For example, process chamber22 may include, in some embodiments, fluid inlets arranged along thesidewall 23 or base 25 of the process chamber. In this manner, processchamber 22 may be adapted to introduce fluids above a wafer, from belowa wafer, or in between wafers when multiple wafers are processed withinthe process chamber.

[0125] In some embodiments, process chamber 22 may include fluid inlet100 positioned below substrate holder 48 as shown in FIG. 1. In somecases, inlet 100 may be configured such that fluid from the inlet isprojected onto the wafer. More specifically, inlet 100 may be configuredto direct fluid toward a region just above substrate holder 48, suchthat the fluid is indirectly projected onto the wafer. An “indirectprojection of fluid,” as used herein, may refer to a projection of fluidwhich is not cast in a straight line toward its target. The target inprocess chamber 22, for example, may be a wafer arranged upon substrateholder 48. In general, the adaptation of inlet 100 to indirectly projecta fluid toward substrate holder 48 may include positioning the inlet toproject the fluid at an angle less than 90° and greater than 0° withrespect to chamber wall 23. In addition, the flow rate of the fluid ispreferably high enough to project the fluid above substrate holder 48.In some cases, a fluid may be projected from inlet 100 at a flow ratesufficient to have the crest of the projection between cover 24 andsubstrate holder 48. In this manner, the fluid may be distributed upon awafer arranged upon the substrate holder 48. In other embodiments,however, a fluid may be projected from inlet 100 at a flow ratesufficient to hit cover 24 and reflect down to a wafer arranged uponsubstrate holder 48.

[0126] In either case, the flow rate and angle at which the fluid isprojected from inlet 100 may be configured to distribute the fluid in aspecific area of the wafer. For example, in some cases, the flow rateand angle at which the fluid is projected from inlet 100 may beconfigured to dispense the fluid along the edge of the wafer, the centerof the wafer, or any other specific location of the wafer. In someembodiments, system 20 may be adapted to adjust the flow rate and angleat which the fluid is projected from inlet 100 such that the locationsthe fluid is dispensed varies. In this manner, the fluid may beuniformly distributed across the wafer. In other embodiments, system 20may additionally or alternatively include a plurality of fluid inletsspatially arranged around substrate holder 48 such that the fluid isdistributed uniformly across the wafer. An example of such aconfiguration of inlets is described in more detail below in referenceto FIGS. 8a and 8 b. In yet other cases, system 20 may be additionallyor alternatively adapted to rotate a wafer such that the fluid may beevenly distributed across the wafer. Alternatively, however, system 20may not be adapted to rotate a wafer.

[0127] Although inlet 100 is described as being positioned belowsubstrate holder 48, inlet 100 is not restricted to such a location. Onthe contrary, inlet 100 may be positioned at any location within processchamber 22. In this manner, process chamber 22 may include other inletswhich are adapted to indirectly project a fluid upon a wafer,independent of where they are located within process chamber 22. In yetother embodiments, inlet 100 may not be configured to indirectly projecta fluid upon a wafer. Rather, inlet 100 may simply be used to introducea fluid to the enclosed area of process chamber 22. Such a configurationmay be particularly advantageous in embodiments in which a bath ofsolution is maintained with process chamber 22 during processing.

[0128] Turning to FIGS. 8a and 8 b, an exemplary arrangement of inletswith which to supply one or more fluids to process chamber 22 is shown.In particular, FIGS. 8a and 8 b show a top view of process chamber 22taken along line AA in FIG. 1 with wafer W is secured to substrateholder 48 via clamping jaw 58. As shown in FIGS. 8a and 8 b, processchamber 22 may, in some embodiments, include a plurality of inlets 160 aand 160 b configured to distribute one or more fluids into the processchamber. In some cases, the distribution of fluids from inlets 160 a and160 b may be projected to central portion 162 of wafer W as shown by thedotted lines in FIG. 8a. Alternatively, the distribution of fluids frominlets 160 a and 160 b may be projected to a different or a plurality ofdifferent portions of wafer W. For example, fluids may be projected atan angle from inlets 160 a and 160 b to distribute the fluids to portion164 of wafer W as shown in FIG. 8b. Such an adaptation mayadvantageously allow fluids to be distributed to a larger surface areaof wafer W from inlets 160 a and 160 b. In some cases, system 20 may beadapted to adjust the angle and flow rate of a fluid through inlets 160a and 160 b such that the distribution of fluids across wafer W mayvary. As a result, the distribution of fluids across wafer W may beadapted to be substantially uniform in some embodiments. As noted above,substrate holder 48 may be additionally adapted to rotate to furtherenhance the distribution of fluids across wafer W.

[0129] In general, inlets 160 a and 160 b may be arranged aboutsubstrate holder 48 such that the one or more fluids may be dispensedupon wafer W. For example, inlets 160 a and 160 b may be arrangedcircumferentially around substrate holder 48. In some embodiments, thearrangement of inlets 160 a and 160 b may be uniform as shown in FIG. 7.In other embodiments, however, the arrangement of inlets 160 a and 160 bmay be not be uniform. In either case, inlets 160 a and 160 b may bearranged below, above, and/or at the approximately the same level as theupper surface of substrate holder 48. In this manner, inlets 160 a and160 b may, in some embodiments, include a similar configuration as inlet100. In yet other embodiments, inlets 160 a and 160 b may be configuredto project one or more fluids directly upon wafer W.

[0130] In some cases, system 20 may be adapted to introduce differentfluids into process chamber 22 through inlets 160 a and 160 b,respectively. In this manner, mixing fluids into a solution may beaverted until the fluids are on the wafer. Such an adaptation may beparticularly advantageous when using deposition solutions that quicklydecompose. For example, the deposition of copper using electrolesstechniques sometimes includes mixing a reducing agent and with a metalion solution. The mixture of the fluids tends to quickly decompose,limiting the deposition efficiency of the solution. As a consequence,the deposition solution may need to be replenished often, if notcontinuously. The adaptation of including plurality of inlets 160 a and160 b may advantageously allow the fluids to mix at the surface of thewafer, increasing the life of the deposition solution. As a result,fluid consumption may be reduced, decreasing the overall process costsof fabricating a device with such a layer.

[0131] As shown in FIGS. 8a and 8 b, inlets 160 a and 160 b may bealternatively spaced about substrate holder 48. Such an arrangement mayadvantageously reduce the amount of interaction between two fluids of asolution before combining them at the surface of a wafer. In otherembodiments, however, limiting the interaction of two fluids beforecombining them at the surface of a wafer may be accomplished byarranging inlets 160 a circumferentially along one side of substrateholder 48 and inlets 160 b circumferentially along the other side ofsubstrate holder 48. It is understood that other arrangements of inlets160 a and 160 b used to minimize the interaction of fluids before beingcombined at the surface of a wafer may be included within processchamber 22 as well.

[0132] In general, fluids supplied to process chamber 22 and used toprocess a wafer residing upon substrate holder 48 may be removed throughexhaust ports of the chamber. For example, process fluids may be removedthrough outlets 88 and/or 102. Although outlets 88 and 102 are shownarranged along the bottom of process chamber 22, the outlets may bearranged along other portions of process chamber 22 as well oralternatively. In addition, process chamber 22 is not restricted tohaving two outlet ports. On the contrary, process chamber 22 may includeany number of outlet ports. In some embodiments, the outlet ports maydischarge the fluids to a waste stream to be disposed. In otherembodiments, however, one or more of the outlet ports may serve torecycle the process fluid back to its respective storage tank. Forexample, outlet 88 may serve to return an electroless depositionsolution back to reservoir 70. In this manner, the deposition solutionmay be reused such that material and disposal costs may be minimized. Insome cases, outlet 88 may include filter 103 such that reservoir 70 isnot contaminated with particles removed from process chamber 22.

[0133] Since the elemental composition of a process fluid may directlyaffect the reaction rate and uniformity of treating a microelectronictopography, process fluids may need to be analyzed and adjusted prior tobeing supplied to process chamber 22. As such, system 20 may includeanalytical test equipment 104 for monitoring fluids used within processchamber 22. In general, analytical test equipment 104 may be usedmeasure the concentration of elements within the process fluid. In thismanner, it can be determined whether the process fluid is inspecification or if the process fluid needs to be adjusted. Theinclusion of analytical test equipment 104 may be particularlyadvantageous when system is configured to recycle one or more fluidsback to their storage tanks. In general, processing a wafer may consumesome of the elements contained within the fluid used to process thewafer. Consequently, it may be advantageous to be able to monitor theconcentration of elements with a process fluid such that the fluid mayhave the proper composition prior to being supplied to process chamber22. In any case, analytical test equipment 104 may, in some embodiments,be coupled to supply line 75, as shown in FIG. 1, such that the processfluid may be analyzed directly before being supplied to process chamber22. In yet other embodiments, analytical test equipment 104 may beadditionally or alternatively coupled to supply line 75, reservoir 70,and/or outlet 88.

[0134] In general, analytical test equipment 104 may be adapted tomeasure the concentration of one or more elements. In some embodiments,however, it may be advantageous to have analytical test equipment 104adapted to analyze four or more components. For example, embodiments inwhich process chamber 22 is used for a plurality of processes, such asthe processes conducted prior to, during, and/or subsequent to anelectroless deposition process, the adaptation of being able to measurethe concentration of at least four components may be advantageous sincethe fluids used for the different process steps may have differentcompositions. In yet other embodiments, it may be advantageous to employanalytical test equipment with such an adaptation for processes whichuse solutions with a plurality of components. An exemplary process usinga solution with at least four components is described in more detailbelow in reference to FIG. 12 in which a four-element barrier layer isdeposited. In such an embodiment, it may be particularly advantageousfor analytical test equipment 104 to be configured to measure theconcentration of at least four components selected from the groupconsisting of boron compounds, chromium, cobalt, molybdenum, nickel,phosphorus compounds, rhenium, and tungsten.

[0135] Regardless of the number of components analytical test equipment104 is adapted to analyze, system 20 may further include lines withwhich to adjust the composition of a process fluid. Such lines may becoupled to supply lines 74 and 75, reservoir 70, and/or outlets 88 and102. In some embodiments, analytical test equipment 104 may be adaptedto analyze the amount of hazardous components discharged from processchamber 22 through outlet 102. In this manner, the amount of agentneeded to neutralize the hazardous components after being discharged maybe optimized.

[0136] In some embodiments, control of system 20 and its components maybe executed through central processing unit (CPU) 106. For instance, CPU106 may include a carrier medium with program instructions for managingthe use of solenoid valves on supply lines supply 74, 75, 76 a, 76 b, 76c, 78, 80 and/or outlets 88 and/or 102 such that fluids may beintroduced and/or discharged for a predetermined sequence and, in somecases, for a predetermined amount of time. For example, upon completionof an electroless deposition process, CPU 106 may include programinstruction with which to discontinue the supply of fluid from supplylines 74 and 75. Subsequently, CPU 106 may send a command to supplydeionized water, for example, from supply line 78, or the supply ofanother treatment or neutralization solution. In some cases, CPU 106 mayalso send commands to regulate the flow of fluid through the outletports of process chamber 22 in between or during the discontinuation andsupply commands of the inlet ports.

[0137] In any case, CPU 106 may further include program instructions forcontrolling the pressure within process chamber 22 as well as thetemperature of substrate holder 48 and fluids introduced into processchamber 22. In some cases, CPU 106 may further include programinstructions for monitoring concentrations of solution elements withinsupply lines supply 74, 75, 76 a, 76 b, 76 c, 78, 80, reservoir 70,and/or solution feed back line 88. In such an embodiment, CPU 106 mayinclude program instructions for adjusting compositions of the solutionelements based upon the analysis performed by analytical test equipment104. In order for CPU 106 to control the components of system 20, CPU106 may be coupled to the components. Such individual connections to thecomponents, however, are not illustrated FIG. 1 to simplify theillustration of the system. Rather, CPU 106 is shown coupled to processchamber 22 by a dotted line to show a general connection to the chamberand the other components included within system 20.

[0138] As shown in FIG. 1, process chamber 22 is generally configured toform a single enclosed area about substrate holder 48 for processing amicroelectronic topography. An alternative configuration for processchamber 22, however, may be adapted to form multiple enclosed areasabout substrate holder 48. An illustration of such an alternativeconfiguration is illustrated in FIGS. 9a-9 c. In particular, FIGS. 9a-9c illustrates process chamber 22 adapted to form two different enclosedareas about a microelectronic topography. As noted above, processchamber 22 may be adapted to perform a succession of different processsteps. As such, although process chamber 22 is shown in FIGS. 9a-9 cwithout any of the auxiliary components described in reference to FIG.1, the process chamber shown in FIGS. 9a-9 c may be coupled to suchcomponents. In particular, the process chamber 22 illustrated in FIGS.9a-9 c may be coupled to supply lines, exhaust lines, temperature andpressure gauges and controls, storage tanks, and a CPU unit.

[0139] Furthermore, the process chamber depicted in FIGS. 9a-9 c mayinclude auxiliary equipment attached thereto. In particular, the processchamber shown in FIGS. 9a-9 c may, in some embodiments, include a gatearranged along a chamber wall and/or a cover of the chamber. In additionor alternatively, the process chamber illustrated in FIGS. 9a-9 c mayinclude a plurality of input ports, such as but not limited to showerelement 92 and dispensing arm 94. The exclusion of input ports and agate within FIGS. 8a-8 c is merely to simplify the illustration of thedrawings and, therefore, does not necessarily indicate the absence ofsuch components. Substrate holder 48, however, is shown within processchamber 22 in FIGS. 9a-9 c to aid in describing the adaptations of thechamber. Such a substrate holder may be substantially similar to thesubstrate holder depicted in FIG. 1 and, therefore, may include similarcomponents and adaptations of the holder as described above.

[0140] In general, process chamber 22 may be adapted to form a firstenclosed area about and including substrate holder 48 as well as asecond, smaller enclosed area about and including the substrate holderas shown in FIGS. 9b and 9 c, respectively. FIG. 9a, on the other hand,illustrates process chamber 22 during the loading of a wafer, prior tothe formation of the first and second enclosed regions. In someembodiments, the adaptation of process chamber 22 to form the first andsecond enclosed regions may include an outer set of portions and aninner set of portions configured to couple with each other andrespectively form the first and second enclosed regions. In particular,process chamber 22 may include upper outer portion 107 and lower outerportion 108 configured to form an enclosed region about substrate holder48. In general, the first enclosed region formed by coupling outerportions 107 and 108 may include everything within the interior of theouter portions, including inner portions 109 and 110. In someembodiments, such a first enclosed region may include the entirety ofprocess chamber 22. In other embodiments, however, process chamber 22may include one or more casings surrounding outer portions 107 and 108.

[0141] In either case, process chamber 22 may further include upperinner portion 109 and lower inner portion 110 configured to form asecond enclosed region about substrate holder 48. Such a second enclosedregion may solely include the portions of process chamber 22 interior tothe inner portions and, therefore, is not as large as the first enclosedregion. In this manner, the configuration of process chamber 22 mayallow multiple regions to be enclosed during processing of a topography.In some embodiments, outer portions 107 and 108 and inner portions 109and 110 may include other configurations with which to form therespective enclosed regions within process chamber 22. For example, gate28 and chamber wall 23 may alternatively serve as outer portions ofprocess chamber 22 with which to form a first enclosed region aboutsubstrate holder 48. In addition or alternatively, inner portions 109and 110 may include a different configuration with which to form thesecond enclosed region about substrate holder 48. For example, lowerinner portion 110 may, in some embodiments, configured in a concaveshape. As such, process chamber 22 is not restricted to the referencesand configurations of outer portions 107 and 108 and inner portions 109and 110 depicted in FIGS. 9a-9 c. Rather, process chamber 22 maygenerally include outer and inner portions with which to form at leasttwo different enclosed regions about a substrate holder.

[0142] In some embodiments, the system comprising process chamber 22 maybe adapted to couple outer portions 107 and 108 prior to the successionof the different process steps performed within the process chamber. Inaddition, the system may be adapted to couple and uncouple innerportions 109 and 110 between the different process steps withoutuncoupling outer portions 107 and 108. For example, the system may beadapted to couple inner portions 109 and 110 prior to an electrolessdeposition process and uncouple the inner portions subsequent to theelectroless deposition process. The system may be additionally oralternatively adapted to couple inner portions 109 and 110 prior to andsubsequent to other processing steps as well, depending on thefabrication parameters of the wafer. In this manner, the system may beadapted to dispense different processing fluids into the first andsecond enclosed areas during different process steps. In some cases, thesystem may be additionally or alternatively adapted to uncouple outerportions 107 and 108 for a drying process of the microelectronictopography. In yet other cases, however, the system may be adapted tokeep outer portions 107 and 108 closed until all processing steps arecompleted. In such an embodiment, a drying process may be alternativelyconducted by injecting gas through an air nozzle or by opening theprocess chamber to ambient air by a means other than uncoupling outerportions 107 and 108, such as opening a gate attached to process chamber22. In yet other embodiments, the drying process may be conducted bydischarging fluids within process chamber 22, creating a low-pressurevacuum by which to dry the topography.

[0143] As shown in FIGS. 9a-9 c, process chamber 22 may include outlet111 arranged within lower outer portion 108 exterior to lower innerportion 110. In addition, process chamber 22 may include outlet 112arranged within lower inner portion 110. In some embodiments, processchamber 22 may be adapted to prevent processing fluids in the firstenclosed area from entering the outlet 112. For example, in someembodiments, process chamber 22 may include a means for spinning amicroelectronic topography arranged upon substrate holder 48. Inparticular, process chamber 22 may be adapted to rotate a wafer at afast enough rate to prevent processing fluids from entering outlet 112.In general, such a rate may be between approximately 0 rpm andapproximately 8000 rpm or, more specifically, between approximately 40rpm and approximately 1200 rpm and may be conducted when inner portions109 and 110 are not coupled together. In contrast, process chamber 22may or may not spin a microelectronic topography when inner portions 109and 110 are coupled. Larger or smaller rates of rotation may be used ineither case, depending on the design specifications of the system andviscosity of the process fluid as described in more detail below.

[0144] In some cases, upper inner portion 109 may also be adapted torotate. In particular, upper inner portion 109 may be configured torotate when decoupled from lower inner portion 110. Such an adaptationto rotate may advantageously allow solution residue from one or moreprocessing steps to be removed from the inner surface of upper innerportion 109. In this manner, cross-contamination of fluids used fordifferent processes may be prevented. In general, upper inner portion109 may be adapted to rotate during any process step used to fabricate amicroelectronic device. For example, upper inner portion 109 may berotated during a rinse and/or a drying cycle of the fabrication process.In any case, the rotation of upper inner portion 109 and the wafer maybe conducted simultaneously or may be conducted independent of eachother. In addition, system 20 may be adapted to rotate upper innerportion 109 and the wafer in the same direction and/or differentdirections.

[0145] A method for processing a microelectronic topography using theconfiguration illustrated in FIGS. 9a-9 c is outlined in the flowchartof FIG. 10. The method may include steps 113 in which a microelectronictopography is loaded into a process chamber. Such a loading step maycorrespond to FIG. 9a of process chamber 22. As shown in FIG. 10, themethod may further include step 114 in which the process chamber isclosed to form a first enclosed area about the microelectronictopography. FIG. 9b illustrates the formation of such a first enclosedregion. The formation of the first enclosed area may, in someembodiments, include moving a cover plate toward a base plate of theprocess chamber. In yet other embodiments, however, the formation of thefirst enclosed area may include moving the base plate toward the coverplate or moving the cover plate and base plate toward each other. Ineither case, the method may further include supplying a first set offluids to the first enclosed area to process the microelectronictopography in one or more process steps as shown in step 115.

[0146] The method may continue to step 116 in which a second, distinctenclosed area is formed about the microelectronic topography subsequentto the step of supplying the first set of fluids. FIG. 9c illustratesthe formation of such a second enclosed region. The second enclosed areamay be supplied with a second set of fluids to further process themicroelectronic topography in one or more other process steps as shownin step 117. In some embodiments, the first set of fluids may includefluids for preparing the microelectronic topography for an electrolessdeposition process and the second set of fluids may include a depositionsolution for the electroless deposition process. In such an embodiment,the method may include reforming the first enclosed area subsequent tothe step of supplying the second set of fluids and supplying a third setof fluids to the reformed first enclosed area to process themicroelectronic topography subsequent to the electroless depositionprocess as shown in steps 118 and 119, respectively. Alternatively, thefirst set of fluids may include a deposition solution for an electrolessdeposition process, and the second set of fluids may include fluids forprocessing the microelectronic topography subsequent to the electrolessdeposition process.

[0147] In any case, the method may further include spinning themicroelectronic topography as noted in step 120. Such a spinning stepmay be conducted while the first and/or second set of fluids is suppliedto the process chamber. As such, step 120 is shown extending from steps115 and 117 by a dotted line. In some embodiments, spinning themicroelectronic topography may be further conducted during the formationof the first and/or second enclosed areas. In general, the rate at whichto spin the topography may depend on the material supplied to theprocess chamber. In particular, a relatively high spin rate may beneeded for fluids with a relatively high viscosity, while a relativelylower spin rate may be needed for fluids with a relatively lowviscosity. As such, the spin rate of the topography when the first andsecond sets of fluids are supplied to the process chamber may be similaror may be substantially different.

[0148] In any case, the microelectronic topography may generally be spunat a rate between approximately 0 rpm and approximately 8000 rpm, ormore specifically between approximately 40 rpm and approximately 1200rpm, depending on the viscosity of the fluid supplied to the processchamber. In some embodiments, the topography may be rotated at asufficient rate to prevent fluids from entering a certain outlet asnoted above. In embodiments in which the first and second sets of fluidscomprise a similar viscosity, the microelectronic topography may berotated at a different rate when the first set fluids are supplied tothe process chamber than when the second set of fluids are supplied tothe process chamber. For example, in some embodiments, themicroelectronic topography may be spun at a rate between approximately 0rpm and approximately 20 rpm when the first set of fluids is supplied tothe process chamber. In contrast, the microelectronic topography may bespun at a rate between approximately 40 rpm and approximately 300 rpmwhen the second set of fluids is supplied to the process chamber or viceversa.

[0149] As noted above, methods for processing a microelectronictopography is provided herein. In particular, methods for forming acontact structure or a via within a dielectric layer are described belowin reference to FIGS. 11-18. Although the process steps described inreference to FIGS. 11-18 are provided in sequence to each other, theprocess steps are not necessarily co-dependent. Consequently, the methoddescribed in reference to FIGS. 11-18 may be performed independent ofeach other. In addition, the topographies depicted in FIGS. 11-18 arenot drawn to scale. In particular, the dimensions of the layers andstructures may vary from tens of angstroms to a few microns. As such,the method described herein is not restricted to forming a device havingthe relative dimensions of the layers and structures depicted in FIGS.11-19. In some embodiments, the process steps described in reference toFIGS. 11-18 may be conducted using the system and/or techniquesdescribed in reference to FIGS. 1-10. However, the process steps ofFIGS. 11-18 are not restricted to the use of such a system. Inparticular, the process steps described in reference to FIGS. 11-18 maybe either conducted within the same chamber or within differentchambers.

[0150]FIG. 11 depicts microelectronic topography 140 having trench 146formed within dielectric layer 144, which in turn is formed uponunderlying layer 142. In general, dielectric layer 144 may be aninterlevel dielectric layer and may serve as an insulating layer, etchstop layer, and/or a polishing stop layer. In any case, dielectric layer144 may have a thickness between approximately 2,000 angstroms andapproximately 10,000 angstroms. Larger or smaller thicknesses ofdielectric layer 144, however, may be appropriate depending on thesemiconductor device being formed. Dielectric layer 144 may include oneor more of various dielectric materials used in microelectronicfabrication. For example, dielectric layer 144 may include silicondioxide (SiO₂), tetraethylorthosilicate glass (TEOS) based silicondioxide, silicon nitride (Si_(x)N_(y)), silicon dioxide/siliconnitride/silicon dioxide (ONO), silicon carbide, carbon-doped SiO₂, orcarbonated polymers. Alternatively, dielectric layer 144 may be formedfrom a low-permittivity (“low-k”) dielectric, generally known in the artas a dielectric having a dielectric constant of less than about 3.5. Onelow-k dielectric in current use, which is believed to make a conformalfilm, is fluorine-doped silicon dioxide. In some cases, dielectric layer144 may be undoped. Alternatively, dielectric layer 144 may be doped toform, for example, low doped borophosphorus silicate glass (BPSG), lowdoped phosphorus silicate glass (PSG), or fluorinated silicate glass(FSG). Low doped BPSG may have a boron concentration of less thanapproximately 5% by weight. Low doped PSG may have a phosphorusconcentration of less than approximately 10% by weight, and morepreferably less than approximately 5% by weight.

[0151] In some cases, underlying layer 142 may be a silicon substrateand may, in some embodiments, be doped either n-type or p-type. Morespecifically, underlying layer 142 may be a monocrystalline siliconsubstrate or an epitaxial silicon layer grown on a monocrystallinesilicon substrate. In addition or alternatively, underlying layer 142may include a silicon on insulator (SOI) layer, which may be formed upona silicon wafer. In any case, the feature subsequently formed withintrench 146 may serve as a contact structure to portions of a siliconsubstrate in some embodiments. In other cases, however, underlying layer142 may include metallization and/or an interlevel dielectric of amicroelectronic topography. In such an embodiment, the featuresubsequently formed within trench 146 may serve as a via to underlyingportions of microelectronic topography 140. In yet other embodiments,the feature subsequently formed within trench 146 may serve as aninterconnect line or any other metallization feature of themicroelctronic topography.

[0152] In any case, trench 146 may be formed within dielectric layer 144by a lithography process known to those skilled in the art ofmicroelectronic fabrication. In particular, a photoresist layer may bepatterned upon dielectric layer 144 and exposed portions of dielectriclayer 144 may be etched to form trench 146. Subsequent to the etchprocess, the patterned photoresist layer may be removed by a strippingprocess such as a wet etch, plasma etch, and/or a reactive ion etchstripping process. Such an etch process may, in some embodiments, beconducted in the same process chamber used to form trench 146. In somecases, the photoresist etch process may be conducted in the same processchamber used to subsequently process semiconductor topography 140. Forexample, the photoresist etch process may be conducted in the sameprocess chamber used to electrolessly deposit material into trench 146.Although FIG. 11 illustrates the formation of a single trench across theillustrated portion of dielectric layer 144, any number of trenches maybe formed across the dielectric layer in accordance with designspecifications of the integrated circuit. In addition, although FIG. 11illustrates trench 146 extending from the upper surface of dielectriclayer 144 to the upper surface of underlying layer 142, the methoddescribed herein is not restricted to such a configuration ofmicroelectronic topography 140. In particular, the depth of trench 146may be reduced, in some embodiments, such that underlying layer 142 isnot exposed.

[0153] In general, the width and depth of trench 146 may be formed inaccordance with the design specifications of the integrated circuit. Forexample, the width of trench 146 may be between approximately 0.02microns and approximately 10 microns. In addition, the depth of trench146 may be between approximately 100 angstroms and approximately 1.0micron. However, larger or smaller widths and depths may be used,depending on the design specifications of the device. In someembodiments, the height (i.e., depth) and width of a semiconductorfeature when viewed in cross section may be described in relation toeach other and may be referred to as an “aspect ratio” of the feature.Consequently, the depth and width of trench 146 may, in someembodiments, be described in terms of an aspect ratio. In particular,the aspect ratio of trench 146 may between approximately 1:2 andapproximately 1:10. However, trench 146 may include larger or smalleraspect ratios, depending on the design specifications of the device.

[0154] As noted above, trench 146 may be used to subsequently form ametal feature within microelectronic topography 140. As such, trench 146may be filled with a metal layer, such as aluminum, copper, tungsten,titanium, silver, or any alloy of such metals. “Metal layer,” as usedherein, may generally refer to any material comprising metal, includinglayers consisting essentially of a metal element and layers includingalloys or intermetallics of a metal element. The deposition of the metallayer forming the bulk of the metal feature within trench 146 isdescribed in more detail below in reference to FIG. 14. In some cases,however, liner layer 148 may be deposited within trench 146 prior to thedeposition of the bulk metal layer. Such a liner layer may serve toadhere the bulk metal layer to trench 146 and/or prevent diffusionbetween the bulk metal layer and underlying portions of microelectronictopography 140. For example, since copper diffuses readily throughsilicon and oxide and undesirably alters the electrical properties oftransistors formed in silicon, liner layer 148 may be deposited withintrench 146 before deposition of a bulk copper layer. Liner layer 148 maybe deposited within trench 146 before the deposition of other bulk metalmaterials as well. In yet other embodiments, the formation of linerlayer 148 may be omitted from microelectronic topography 140 and,therefore, the method described herein may continue onto to FIG. 14 fromFIG. 3.

[0155] As shown in FIG. 12, liner layer 148 may be formed conformablyupon microelectronic topography 140 and, therefore, may be formed uponthe lower surface and sidewalls of trench 146 as well as the uppersurfaces of dielectric layer 144. Such a deposition process may includechemical vapor deposition (CVD), physical vapor deposition (PVD), atomiclayer deposition (ALD), electroplating, or electroless platingtechniques, depending on the material deposited. Consequently, thedeposition solution used to deposit liner layer 148 may depend on thematerial to be deposited and the method of deposition. In any case,microelectronic topography 140 may be rinsed with deionized watersubsequent to the deposition of liner layer 148 to remove any residualdeposition solution. In general, the thickness of liner layer 148 maybetween approximately 50 angstroms and approximately 1500 angstroms.Larger or smaller thickness of liner layer 148, however, may be used,depending on the design specifications of the device.

[0156] In some cases, liner layer 148 may include a metal material, suchas tantalum, tantalum nitride, tantalum silicon nitride, tantalum carbonnitride, silver, titanium, titanium nitride, titanium silicon nitride,titanium silicon nitride, tungsten, tungsten nitride, or refractoryalloys such as titanium-tungsten or copper-cadium. In some embodiments,liner layer 148 may include a combination of metal materials, such as astack of tantalum nitride and tantalum or a stack of titanium andtitanium nitride, for example. In some cases, it may be particularlyadvantageous for liner layer 148 to include a metal such that thecapacitance of the feature formed within trench 146 may be minimized. Inyet other embodiments, however, liner layer 148 may include a dielectricmaterial, such as silicon nitride, silicon carbide, silicon carbonnitride, silicon oxycarbide, silicon oxycarbon nitride, and/or anyorganic materials generally known for use in microelectronicfabrication. In any case, liner layer 148 may be hydrated as describedin more detail below in reference to FIG. 13. It is noted, however, thatliner layer 148 is not restricted to being hydrated and/or thecompositions listed above. In general, the materials listed for linerlayer 148 and the subsequent processing of liner layer 148 presentedherein are merely options available for forming a metal feature withinmicroelectronic topography 140. Such a statement may be applicable toutilizing a four-element liner layer discussed in more detail below aswell. In particular, the metal feature and method of forming the featuredescribed herein is not restricted to embodiments in which liner layer148 includes at least four elements.

[0157] As noted above, liner layer 148 may, in some embodiments, includea single material comprising at least four elements. In particular,liner layer 148 may include a single material comprising at least fourelements from the group consisting of boron, chromium, cobalt,molybdenum, nickel, phosphorus, rhenium, and tungsten. For example, insome cases, liner layer 148 may include a material comprising cobalt,tungsten, molybdenum and phosphorus. In other cases, liner layer 148 mayinclude a material comprising cobalt, tungsten, molybdenum and boron. Inany case, liner layer 148 may be formed as a single material layer suchthat no interfacial lines between layers of different compositions existwithin the layer. In other words, the elements within liner layer 148may be blended to characterize a layer of single material. Consequently,liner layer 148 may be distinguishable from a metal feature comprising aplurality of liner layers.

[0158] A “liner layer,” as used herein, may refer a layer conformablyformed along at least a portion of the sidewalls and/or lower surface ofa trench such that a substantial portion of the trench prior to thedeposition of the layer remains unfilled after deposition of the layer.In some embodiments, the liner layer may be formed along the entirety ofthe sidewalls and lower surface of the trench as shown in FIG. 12. Inother embodiments, however, the liner layer may only be partially formedon the sidewalls and/or lower surface of the trench. In such anembodiment, the liner layer may either be selectively deposited orportions of the layer may be removed after a blanket deposition of thelayer within the trench. In either case, the liner layer may, in someembodiments, be arranged along portions of the topography adjacent tothe trench as shown in FIG. 12. Alternatively, the liner layer may notinclude the adjacent portions.

[0159] In general, liner layer 148 may include any combination of boron,chromium, cobalt, molybdenum, nickel, phosphorus, rhenium, and tungsten,depending on the design characteristics of the device. For example,liner layer 148 may include a combination of elements which isconfigured to adhere a bulk metal layer used to subsequently fill trench146. In addition or alternatively, liner layer 148 may include acombination of elements which is configured to substantially preventdiffusion between underlying layers of microelectronic topography 140and the bulk metal layer subsequently formed upon the liner layer. Insuch an embodiment, including molybdenum within liner layer 148 may beparticularly advantageous since molybdenum exhibits superior diffusionbarrier properties and has a high melting point. In any case, linerlayer 148 may, in some embodiments, include a combination of elementswhich is less susceptible to oxidation than a liner layer comprising amaterial with three or less elements. For example, liner layer 148 mayinclude products of oxidizing reducing agents, such as boron orphosphorus.

[0160] In some cases, liner layer 148 may include a combination ofelements which is configured to serve as a catalyst for a subsequentelectroless deposition of a bulk metal layer within trench 146. Forexample, liner layer 148 may include a combination of elements which isconfigured to serve as a catalyst for a subsequent electrolessdeposition of copper or any other metal used to occupy a substantialportion of trench 146. In such an embodiment, liner layer 148 maypreferably include cobalt and/nickel for their ability to form anautocatalytic surface. “Autocatalytic,” as used herein, may refer to thecharacteristic of a material to have electrochemical properties whichexhibit an affinity to the material to be deposited thereon.Consequently, an “autocatalytic” material may not have to be activatedprior to an electroless deposition process since the material is alreadycatalytic to the process. In some embodiments, however, an autocatalyticmaterial may be activated prior to an electroless deposition process.

[0161] In some cases, liner layer 148 may include a majority of cobaltand/or nickel atoms. For example, liner layer 148 may include two orthree elements other than cobalt or nickel which each comprise betweenapproximately 0.1% and approximately 20% of a molar concentration of theliner layer. In particular, liner layer 148 may include one or twoelements having a molar concentration between approximately 0.1% andapproximately 20% which are selected from the group consisting ofchromium, molybdenum, rhenium, and tungsten. In addition, liner layer148 may include between approximately 0.1% and approximately 20% ofphosphorous and/or boron. The remaining balance of the molarconcentration of the layer may include cobalt and/or nickel.

[0162] Regardless of number of elements included within liner layer 148,the method may further include hydrating microelectronic topography 140,in some cases. In particular, microelectronic topography 140 may beexposed to a hydrolysis process subsequent to the deposition of linerlayer 148 such that hydrated layer 150 may be formed as shown in FIG.13. For example, in embodiments in which liner layer 148 includestantalum, tantalic acid (H_(2x)Ta₂O_(5+x)) may be formed. In yet otherembodiments, liner layer 148 may include tantalum nitride, tantalumsilicon nitride, tantalum carbon nitride, titanium, titanium nitride,titanium silicon nitride, tungsten, tungsten nitride, or refractoryalloys such as titanium-tungsten with which to form a hydrated metaloxide layer. As noted above, the liner layer 148 may, in someembodiments, include a combination of such materials, such as a stack oftantalum nitride and tantalum or a stack of titanium and titaniumnitride, for example. In such an embodiment, a hydrated metal oxidelayer may be formed solely from the upper material of the stack or maybe formed from more than one material within the stack. In yet otherembodiments, liner layer 148 may not include a dielectric materialrather than a metal layer. For example, liner layer 148 may includesilicon nitride, silicon carbide, silicon carbon nitride, siliconoxycarbide, and/or silicon oxycarbon nitride. In such an embodiment,liner layer 148 may be hydrated to form a hydrated oxide materialwithout a metal component.

[0163] In any case, the hydrolysis process may include oxidizing linerlayer 148. As such, the hydrolysis process may include exposing linerlayer 148 to an oxidizing plasma, in some embodiments. In addition oralternatively, the hydrolysis process may include exposing liner layer148 to an oxidizing chemical, such as peroxide, in a liquid or gaseousstate. In yet other embodiments, the hydrolysis process may includeexposing the liner layer to ultraviolet photons in an oxidizing ambient.In such a case, the ultraviolet photons may be used to alter themolecular structure of the liner layer such that elements of the linerlayer may be oxidized. In any embodiment, the hydrolysis process mayfurther include exposing liner layer 148 to a chemical comprisinghydrogen, including any acid, base or neutral chemical includinghydrogen. For example, the hydrolysis process may further includeexposing liner layer 148 to sulfuric acid, hydrochloric acid, nitricacid, ammonia hydroxide, potassium hydroxide, or deionized water.

[0164] In general, the hydrolysis process used to form hydrated layer150 may either partially or completely consume liner layer 148. In someembodiments, the hydration of liner layer 148 may consume an upperportion of the layer having a thickness between approximately 5angstroms and approximately 40 angstroms. As such, the thickness ofliner layer 148 may be reduced by such an amount during the hydrolysisprocess. In some cases, the hydrolysis process may cause a growth uponliner layer 148 in addition to consuming liner layer 148. In such anembodiment, the composite thickness of liner layer 148 and hydratedlayer 150 may be larger than the thickness of liner layer 148 prior tothe hydrolysis process. In particular, the composite thickness of linerlayer 148 and hydrated layer 150 may include a thickness betweenapproximately 50 angstroms and approximately 1600 angstroms. Morespecifically, hydrated layer 150 may include a thickness betweenapproximately 5 angstroms and approximately 50 angstroms. As notedabove, not all process steps described herein need to be included in theprocess of forming a metal feature within trench 146. As such, in someembodiments, the hydrolysis of liner layer 148 may be omitted. In eithercase, the process of forming a metal feature within trench 146 mayinclude cleaning liner layer 148 prior to the deposition of bulk metallayer 152. In particular, surface contaminants and/or oxides formed uponliner layer 148 may be removed prior to the formation of hydrated layer150 or directly prior to the deposition of bulk metal layer 152.

[0165] In general, hydrating liner layer 148 may be particularlyadvantageous when the bulk metal layer for the subsequently formed metalfeature is deposited using an electroless deposition process. Inparticular, hydrated layer 150 may serve to adsorb active catalyticmetals subsequently deposited upon microelectronic topography 140 suchthat a bulk metal layer may be electrolessly deposited. Morespecifically, hydrated layer 150 may allow more active catalytic metalsto be adsorbed as compared to a layer which has not been hydrated.Consequently, the subsequent electroless deposition of bulk metal may befaster, more uniform, and adhere more securely to trench 146. In someembodiments, hydrated layer 150 may be autocatalytic and, therefore, maynot have to be activated to initiate the electroless deposition process.In other embodiments, however, hydrated layer 150 may have to beactivated prior to electrolessly deposition bulk metal layer 152. Suchan activation process may also be conducted when liner layer 148 is nothydrated. In either case, the activation process may include depositinga monolayer of cobalt, nickel, palladium, or platinum such that a seedlayer of the material may be formed. In such an embodiment, the seedlayer may be patterned to be in alignment with trench 146 prior to thedeposition of bulk metal layer 152.

[0166] In yet other embodiments, however, the bulk metal layersubsequently deposited within trench 146 may not be electrolesslydeposited. Rather, the bulk metal layer may be deposited using CVD, PVD,ALD, or electroplating techniques, depending on the type of materialbeing deposited. In such an embodiment, liner layer 148 and/or hydratedlayer 150 may not have to be activated. In some cases, liner layer 148and/or bulk metal layer 152 may be deposited as oxidized materials andlater converted into conductive metals by annealing the layers in areducing ambient. In any case, microelectronic topography 140 may berinsed with deionized water prior to the deposition of bulk metal layer152. More specifically, microelectronic topography 140 may be rinsedsubsequent to the formation of hydrated layer 150 and/or subsequent tothe deposition of the activation seed layer to remove any residualdeposition solutions. In general, bulk metal layer 152 may include aconductive material, such as aluminum, cadmium, copper, tungsten,titanium, silver, or any alloy of such metals. In this manner, thefeature formed within trench 146 may be used to electrically transmitsignals within the device formed therefrom.

[0167] As shown in FIG. 14, bulk metal layer 152 may be deposited withintrench 146. In particular, bulk metal layer 152 may, in someembodiments, be formed conformably over microelectronic topography 140such that the bulk metal layer is formed outside of trench 146 as wellas inside the trench. In yet other embodiments, however, bulk metallayer 152 may be selectively deposited within trench 146. Such aselective process may include electrolessly depositing a bulk metallayer upon a liner layer which is catalytic to the electrolessdeposition process. For example, bulk metal layer 152 may be selectivelydeposited upon a liner layer comprising at least four elements asdescribed above in reference to FIG. 12. In such an embodiment, portionsof the liner layer formed upon the upper surfaces of dielectric layer144 may be removed prior to the electroless deposition of the bulk metallayer. In this manner, the bulk metal layer may not be deposited uponportions of microelectronic topography 140 arranged adjacent to trench146. In such an embodiment, the bulk metal layer may be formed to aparticular level within trench 146. For example, bulk metal layer 152may be formed to be substantially coplanar with the upper surfaces ofdielectric layer 144 or just slightly below the upper surfaces ofdielectric layer 144 such that room within trench 146 remains for thedeposition of a cap layer upon bulk metal layer 152.

[0168] In yet other cases, bulk metal layer 152 may be deposited to alevel above the upper surfaces of dielectric layer 144. In particular,bulk metal layer 152 may be deposited to a thickness between 0.5 micronsand approximately 1.5 microns such that trench 146 is filled. Such aconfiguration may be particularly advantageous in an embodiment in whichbulk metal layer 152 is conformably formed across microelectronictopography 140 as shown in FIG. 14. In such an embodiment, portions ofbulk metal layer 152 deposited outside of trench 146 may be removed suchthat the metal feature within trench 146 may be substantially planarwith the upper surfaces of dielectric layer 144. Such a removal processmay include chemical mechanical polishing microelectronic topography 140or exposing the topography to an etch back process. In either case,portions of liner layer 148 and hydrated layer 150 deposited outside oftrench 146 may also be removed as shown in FIG. 14. Alternatively,portions of liner layer 148 and, in some embodiments, portions ofhydrated layer 150 arranged on the upper surfaces of dielectric layer144 may remain after the removal process such that bulk metal layer 152is substantially coplanar with either liner layer 148 or hydrated layer150. In any case, microelectronic topography 140 may be rinsed withdeionized water subsequent to the deposition of bulk metal layer 152 toremove any residual deposition solution.

[0169] In any case, microelectronic topography 140 may, in someembodiments, be annealed subsequent to the formation of bulk metal layer152 within trench 146. Such an anneal process may include subjectingmicroelectronic topography 140 to a temperature greater thanapproximately 400° C. In some cases, the anneal process may enhance theadhesion of bulk metal layer 152 within trench 146. In addition oralternatively, the anneal process may include dehydrating hydrated layer150 to form oxide layer 154 between bulk metal layer 152 and liner layer148, as shown in FIG. 15. For example, in an embodiment in whichhydrated layer 150 includes tantalic acid, a layer of tantalum pentoxidemay be formed between bulk metal layer 152 and liner layer 148. It isnoted that other oxide layers may alternatively be formed withinmicroelectronic topography 140, depending on the composition of hydratedlayer 150. In some embodiments, it may be particularly advantageous toform an oxide layer with metal such that the capacitance of the metalfeature formed within trench 146 may be minimized. Consequently, theprocess of hydrating liner layer 148 and dehydrating hydrated layer 150may be particularly advantageous when liner layer 148 includes a metal.In yet other embodiments, an oxide layer may not be formed within trench146. In particular, in embodiments in which hydrated layer 150 is notformed within the topography, an oxide layer may not be formed withinthe metal feature during the subsequent anneal process. In yet otherembodiments, the method for forming the metal feature as describedherein may not include an anneal process.

[0170] In some embodiments, it may be desirable to deposit a cap layerupon the metal feature formed within trench 146. Such a cap layer mayserve to prevent diffusion between the metal feature and overlyinglayers. In addition or alternatively, the cap layer may serve to protectthe metal feature during subsequent processing. For example, the caplayer may serve as a polishing stop layer or an etch stop layer suchthat the metal feature is not exposed or damaged. As such, the methoddescribed herein may include the formation of a cap layer upon the metalfeature formed within trench 146. In some cases, the formation of thecap layer may follow the sequence of steps described below in referenceto FIGS. 16-18. The method described herein, however, is not restrictedto such a sequence of process steps. In particular, the method mayalternatively include forming the cap layer upon the metal featurewithin trench 146 without a deposition of a hydrophobic material uponadjacent portions of dielectric layer 144 as described below inreference to FIG. 16. In this manner, dielectric layer 144 may remainexposed prior to the deposition of the cap layer.

[0171] Referring to FIG. 16, in some embodiments, hydrophobic dielectric156 may be selectively deposited upon exposed surfaces of dielectriclayer 144. In this manner, dielectric layer 144 may be masked for thesubsequent deposition of cap layer 158. In some embodiments, it may bedesirable to mask dielectric layer 144 for the deposition of cap layer158. In particular, hydrophobic dielectric 156 may serve to prevent thedeposition of cap layer 158 upon dielectric layer 144. Morespecifically, a hydrophobic surface may advantageously prevent theabsorption of catalytic compounds, inhibiting the electroless depositionof materials upon hydrophobic dielectric 156, as described in moredetail below. In embodiments in which bulk metal layer 152 is polishedto be confined within the sidewalls of trench 146 (as described inreference to FIG. 15), dielectric layer 144 may include small fragmentsof bulk metal layer 152 upon its upper surface. The small fragments maybe catalytic to the electroless deposition of cap layer 158 or mayattract a catalytic seed layer used to electrolessly deposit cap layer158. In either case, portions of cap layer 158 may be undesirablydeposited upon dielectric layer 144, potentially causing a short withinthe circuit.

[0172] In some cases, dielectric layer 144 may be cleaned prior to thedeposition of cap layer 158 to remove the small fragments of bulk metallayer 152 formed within dielectric layer 144. In some embodiments,however, it may be difficult to determine if all fragments have beenremoved from such a process. As such, in some cases, the formation of ahydrophobic layer upon dielectric layer 144 may be more effective inpreventing the undesirable deposition of cap layer 158 on dielectriclayer 144. Although the deposition of hydrophobic dielectric 156 maynegate the need to remove the bulk metal fragments from dielectric layer144, the method described herein does not necessarily restrict theinclusion of such a cleaning step when a hydrophobic layer is to bedeposited upon dielectric layer 144. As such, cleaning dielectric layer144 may be performed whether or not a hydrophobic layer is formed withinmicroelectronic topography 140.

[0173] In general, hydrophobic dielectric 156 may include various formsof halogenated silanes and/or polymeric silanes. The polymeric silanematerials may be polymeric functional groups or may be a polymer withpolymeric silane functional groups. Use of either type of polymericsilane material may be particularly useful for sealing a porous surfaceof a low-k dielectric layer. More specifically, polymeric silanematerials may be advantageous for preventing moisture and components ofan electroless deposition solution into a low-k dielectric material,which may sometimes be used for dielectric layer 144. The selectivedeposition of hydrophobic dielectric 156 upon dielectric layer 144 mayinclude, for example, organic vapor phase deposition of any silanematerial configured to deposit a dielectric material in a halogenated orpolymeric form. For example, the selective deposition of hydrophobicdielectric 156 may include the organic vapor phase deposition ofdichlorodimethylsilane or dichloromethylsilane. Other silane materialthat may be additionally or alternatively used for the deposition ofhydrophobic dielectric 156 may include methyldichlorosilane,methyltrichlorosilane, trimethylchlorosilane, ethyldichlorosilane,ethyltrichlorosilane, methylethylchlorosilane, methyethyldichlorosilane,propyldichlorosilane, chloropropylmethyldichlorosilane,chloropropyltrichlorosilane, vinyltrichlorosilane,vinylmethyldichlorosilane, phenyltrichlorosilane,diphenyldichlorosilane, phenylmethyldichlorosilane,phenylethyldichlorosilane, trichlorosilane, polyalkenedichlorosilane,polymethylenedichlorosiolane (TBD), and polyethylenedichlorosilane.

[0174] In any case, the selective deposition of hydrophobic dielectriclayer 156 may also include exposing the substrate to deionized water. Inparticular, exposing microelectronic topography 140 to deionized waterduring or after the deposition of hydrophobic dielectric 156 may serveto hydrolize the silane material absorbed within dielectric layer 144and remove any hydrochloric acid such that a strong bond betweenhydrophobic 156 and dielectric layer 144 may be formed. In general, thethickness of hydrophobic dielectric 156 may be between approximately 5angstroms and approximately 500 angstroms. However, larger or smallerthicknesses of hydrophobic dielectric 156 may be deposited, depending onthe design specifications of the device. For example, in someembodiments, it may be advantageous to deposit hydrophobic dielectric156 to a thickness less than approximately 500 angstroms such that thestep height of cap layer 158 above dielectric layer 144 is minimized.

[0175] As noted above, the deposition of hydrophobic dielectric 156 maybe advantageous for preventing the deposition of cap layer 158 uponportions of microelectronic topography 140 other than above trench 146,particularly in embodiments in which cap layer 158 is electrolesslydeposited. More specifically, since layer 156 is a dielectric material,it will not be catalytic to the deposition of cap layer 158. Inaddition, layer 156 may prohibit solution adsorption onto the layersince it is hydrophobic. In general, hydrophilic materials, such asthose used for dielectric layer 144, may be susceptible to adsorbingcatalytic ions from an activation solution, particularly solutionsincluding palladium ions. As a result, a material subsequently depositedupon microelectronic topography 140 using electroless depositiontechniques may be formed upon dielectric layer 144 as well as abovetrench 146. Since layer 156 is hydrophobic, however, the deposition ofcap layer upon portions of microelectronic topography 140 other thanabove the metal feature within trench 146 may be avoided.

[0176] In general, cap layer 158 may be deposited upon microelectronictopography 140 as shown in FIG. 17. As noted above, in some embodiments,cap layer 158 may be electrolessly deposited upon microelectronictopography 140 and, therefore, may be selectively deposited upon themetal feature within trench 146. In some embodiments, bulk metal layer152 may be catalytic to the deposition of cap layer 158 and, therefore,the deposition of a catalytic seed layer upon the bulk metal layer maynot be needed. However, in some embodiments, bulk metal layer 152 may bea slow catalyst to the electroless deposition of cap layer 158,undesirably limiting the deposition rate of cap layer 158. For example,a bulk metal layer of copper may be a slow catalyst to the electrolessdeposition of a cap layer of cobalt, tungsten, and phosphorus. In yetother embodiments, bulk metal layer 152 may not be catalytic to thedeposition of cap layer 158 at all.

[0177] As such, in some embodiments, a catalytic seed layer may bedeposited upon microelectronic topography 140 prior to the deposition ofcap layer 158 to enable and/or enhance the selective electrolessdeposition of the cap layer upon the metal feature within trench 146. Inparticular, a monolayer of cobalt, nickel, palladium, or platinum may bedeposited upon microelectronic topography 140 and subsequently patternedto be in alignment with the metal feature within trench 146 prior to thedeposition of cap layer 158. In such an embodiment, microelectronictopography 140 may, in some cases, be rinsed in order to remove anydeposition residue of the seed layer prior to the deposition of caplayer 158. In yet other embodiments, cap layer 158 may be conformablydeposited across microelectronic topography 140 and patterned to alignwith the metal feature in trench 146. As such, cap layer 158 may bedeposited by processes other than electroless deposition techniques. Inparticular, cap layer 158 may be deposited by CVD, PVD, ALD, orelectroplating techniques. In general, cap layer 158 may be formed to athickness between approximately 5 angstroms and approximately 50angstroms. Larger or smaller thicknesses of cap layer 158 may bedeposited, however, depending on the design specifications of thedevice. In any case, microelectronic topography 140 may be cleanedand/or rinsed subsequent to the deposition of cap layer 158 to removeany deposition residue that may have been sparsely formed uponhydrophobic dielectric 156.

[0178] In general, cap layer 158 may include one or more elements whichare configured to substantially prevent diffusion between bulk metallayer 152 and subsequently formed overlying layers of microelectronictopography 140. For example, cap layer 158 may include a metal material,such as tantalum, tantalum nitride, tantalum silicon nitride, tantalumcarbon nitride, titanium, titanium nitride, titanium silicon nitride,tungsten, tungsten nitride, or refractory alloys such astitanium-tungsten. In some embodiments, the liner layer 148 may includea combination of such materials, such as a stack of tantalum nitride andtantalum or a stack of titanium and titanium nitride, for example. Inyet other embodiments, cap layer 158 may include any combination ofboron, chromium, cobalt, molybdenum, nickel, phosphorus, rhenium, andtungsten, depending on the design characteristics of the device. Inparticular, cap layer 158 may include a single material comprising atleast four of such elements as described above in reference to FIG. 12.In yet other embodiments cap layer 158 may include two or three of suchelements. For instance, cap layer 158 may include cobalt, tungsten andphosphorus. Other combinations of the aforementioned elements may bepossible, depending on the design characteristics of the device.

[0179] As shown in FIG. 17, a microelectronic topography may be formedwhich includes a metal feature having cap layer 158 formed upon and incontact with bulk metal layer 152. In addition, the microelectronictopography may include a dielectric portion including a lower surfacesubstantially coplanar with a lower surface of the metal feature andhaving a lower layer of hydrophilic material and an upper layer ofhydrophobic material. As noted above, dielectric layer 144 may include adielectric material such as silicon dioxide, silicon nitride, or siliconoxynitride. All such materials are hydrophilic materials, so thedielectric portion of the aforementioned microelectronic topography mayrefer to hydrophobic dielectric 156 formed upon and in contact withdielectric layer 144.

[0180] As shown in FIG. 18, hydrophobic dielectric 156 may be removedsubsequent to the deposition of cap layer 158, in some embodiments. Sucha removal process may include wet or dry etching techniques, such asprocesses using solvent-based fluids and/or dissolved ozone water,supercritical cleaning techniques, ultraviolet ablation, and/or plasmaetching. In some embodiments, only the hydrophobic surface layer ofhydrophobic dielectric 156 may be removed by such a process. In yetother embodiments, however, hydrophobic dielectric 156 may not beremoved at all. In particular, hydrophobic dielectric 156 may remainwithin microelectronic topography 140 for subsequent processing. Forexample, hydrophobic layer 156 may be used to adhere a subsequentlydeposited layer. In addition or alternatively, hydrophobic layer 156 maybe used as an etch stop layer. In such an embodiment, some of thehydrogen atoms within hydrophobic layer 156 may be replaced with aminogroups to produce a material with a higher etch selectivity.

[0181] In some cases, microelectronic topography 140 may be furtherprocessed to form additional layers and structures above the contactstructure formed within trench 146. For example, in some embodiments,microelectronic topography 140 may be exposed to processes which formdielectric and/or conductive features upon the contact structure. Insome embodiments, an additional layer may be formed upon cap layer 158to improve the adhesion of the cap layer to subsequently formedoverlying layers and structures. In some cases, the additional layer mayadditionally or alternatively serve as a diffusion barrier for thecontact structure. In yet other embodiments, the additional layer mayserve as an etch stop layer. In such an embodiment, the additional layermay be blanketed deposited across microelectronic topography 140 suchthat the additional layer resides upon portions adjacent to cap layer158 as well as cap layer 158. In any case, the additional layer mayinclude siloxanes, amino-compounds, hetero-atomic organic compounds, orinorganic compounds, for example.

[0182] It will be appreciated to those skilled in the art having thebenefit of this disclosure that this invention is believed to provide asystem and methods for processing a microelectronic topography. Furthermodifications and alternative embodiments of various aspects of theinvention will be apparent to those skilled in the art in view of thisdescription. For example, although the process chamber and methodsprovided herein are frequently described in reference to process stepsconducted prior to, during, and subsequent to an electroless depositionprocess, the system and methods are not necessarily restricted to suchprocesses. Accordingly, this description is to be construed asillustrative only and is for the purpose of teaching those skilled inthe art the general manner of carrying out the invention. It is to beunderstood that the forms of the invention shown and described hereinare to be taken as the presently preferred embodiments. Elements andmaterials may be substituted for those illustrated and described herein,parts and processes may be reversed, and certain features of theinvention may be utilized independently, all as would be apparent to oneskilled in the art after having the benefit of this description of theinvention. Changes may be made in the elements described herein withoutdeparting from the spirit and scope of the invention as described in thefollowing claims.

1.-25. (Canceled)
 26. A process chamber, comprising: a substrate holder;and a reservoir arranged above the substrate holder and within sidewallsof the process chamber, wherein the process clamber is adapted to movethe reservoir proximate to the substrate holder, wherein the reservoircomprises a hatch, and wherein the process chamber is adapted touncouple the hatch from the reservoir and rotate the hatch within thereservoir.
 27. The process chamber of claim 26, wherein the reservoir isadapted to hold one or more fluids for processing a microelectronictopography.
 28. The process chamber of claim 27, wherein the reservoiris adapted to hold one or more single-phase fluids.
 29. The processchamber of claim 27, further adapted to replenish the fluids within thereservoir.
 30. The process chamber of claim 26, wherein the reservoircomprises one or more valves, and wherein the process chamber is adaptedto open the valves upon moving the reservoir proximate to the substrateholder. 31.-42. (Canceled)
 43. A process chamber, comprising: a wallwith an opening; a first fixed barrier spaced in proximity to and inalignment with the wall opening; a casing coupled to the wall andconfigured to form an enclosure about the wall opening, wherein thecasing comprises an opening laterally adjacent to the wall opening; anda second fixed barrier spaced in proximity to and in alignment with thecasing opening.
 44. The process chamber of claim 43, wherein the firstfixed barrier is spaced in proximity to the wall opening along the sideof the wall interior to the process chamber.
 45. The process chamber ofclaim 44, wherein the second fixed barrier is further spaced inproximity to the wall opening along the side of the wall exterior to theprocess chamber.
 46. The process chamber of claim 43, wherein the firstand second fixed barriers prevent fluids within the process chamber fromflowing through the wall opening and the casing opening.
 47. The processchamber of claim 43, wherein the process chamber is adapted to draw airthrough the casing opening and the wall opening into the processchamber.
 48. A semiconductor process chamber, comprising: a substrateholder; and a reservoir arranged within sidewalls of the processchamber, wherein the process chamber is adapted to move the reservoircloser to and farther away from the substrate holder, wherein thereservoir comprises a hatch, and wherein the process chamber isconfigured to uncouple the hatch from a side of the reservoir and movethe hatch within the reservoir.
 49. (Canceled)
 50. The semiconductorprocess chamber of claim 48, wherein the process chamber is configuredto position the hatch midway within the reservoir.
 51. The semiconductorprocess chamber of claim 48, wherein the process chamber is configuredto rotate the hatch within the reservoir.
 52. The semiconductor processchamber of claim 48, wherein the hatch comprises a length substantiallysimilar to or greater than the diameter of a wafer processed in thesemiconductor process chamber.
 53. A process chamber, comprising: asubstrate holder; and a reservoir arranged within sidewalls of theprocess chamber, wherein the process chamber is adapted to position thereservoir in contact with the substrate holder.
 54. The process chamberof claim 53, wherein the reservoir comprises a hatch, and wherein theprocess chamber is configured to move the hatch subsequent topositioning the reservoir in contact with the substrate holder.
 55. Theprocess chamber of claim 53, wherein the hatch comprises one or morevalves, and wherein the process chamber is configured to open the valvessubsequent to positioning the reservoir in contact with the substrateholder.